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首页> 外文期刊>Microelectronic Engineering >Observation of temperature effect on electrical properties of novel Au/Bi0.7Dy0.3FeO3/ZnO/p-Si thin film MIS capacitor for MEMS applications
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Observation of temperature effect on electrical properties of novel Au/Bi0.7Dy0.3FeO3/ZnO/p-Si thin film MIS capacitor for MEMS applications

机译:温度对MEMS应用新型Au / Bi0.7Dy0.3FeO3 / ZnO / p-Si薄膜MIS电容器电学性能的影响

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摘要

In this work thedependence of electrical properties on operation temperature (27 degrees C to 200 degrees C) of Au-Cr/Bi0.7Dy0.3FeO3 (BDFO)/ZnO/p-Si (MIS device) are discussed. The thin film of BDFO was deposited by pulsed laser deposition (PLD) on p-Si. From the electrical characterization, the devices properties like ideality factor (eta), barrier height) (BH) of Au-Cr/BDFO/ZnO/p-Si MIS were determined. The values of eta and BH were found to be 134.and 0.86 eV at 200 degrees C and 2.16 and 0.30 eV; respectively, at room temperature (27 degrees C). The leakage current conduction mechanism of the device was investigated and found to be Schottky emission (SE) in the low electric field (<0.92 MV cm(-1)) regime and trap assisted Poole-Frenkel (PF) mechanism for high electric field regime. The coexistence of ferroelectric and ferromagnetic coupling and excellent dielectric properties in multiferroic BDFO offers potential in the field of memory devices; sensing and energy harvesting (cantilevers). (C) 2016 Elsevier B.V. All rights reserved.
机译:在这项工作中,讨论了电性能对Au-Cr / Bi0.7Dy0.3FeO3(BDFO)/ ZnO / p-Si(MIS器件)的工作温度(27摄氏度至200摄氏度)的依赖性。 BDFO薄膜通过脉冲激光沉积(PLD)沉积在p-Si上。根据电学特征,确定了Au-Cr / BDFO / ZnO / p-Si MIS的器件特性,例如理想因子(η),势垒高度(BH)。发现在200摄氏度时eta和BH的值为134.和0.86 eV,而在2.16和0.30 eV时为。分别在室温(27摄氏度)下。研究了该设备的泄漏电流传导机理,发现其在低电场(<0.92 MV cm(-1))态下为肖特基发射(SE),而在高电场态下为陷阱辅助的Poole-Frenkel(PF)机制。铁电和铁磁耦合的共存以及多铁性BDFO中优异的介电性能为存储器件领域提供了潜力。感应和能量收集(悬臂)。 (C)2016 Elsevier B.V.保留所有权利。

著录项

  • 来源
    《Microelectronic Engineering》 |2017年第1期|55-61|共7页
  • 作者单位

    Indian Inst Technol, Dept Elect Engn, Bombay 400076, Maharashtra, India|Indian Inst Technol, Ctr Excellence Nanoelect, Bombay 400076, Maharashtra, India;

    Indian Inst Technol, Ctr Res Nanotechnol & Sci, Bombay 400076, Maharashtra, India;

    Indian Inst Technol, Ctr Res Nanotechnol & Sci, Bombay 400076, Maharashtra, India;

    Rajasthan Tech Univ, Dept Elect Engn, Kota 324010, India;

    Indian Inst Technol, Dept Elect Engn, Bombay 400076, Maharashtra, India|Indian Inst Technol, Ctr Excellence Nanoelect, Bombay 400076, Maharashtra, India;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    BDFO/ZnO; PLD; Multiferroic; Ideality factor; Barrier height;

    机译:BDFO / ZnO;PLD;多铁性;理想因子;势垒高度;

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