Computational study on polymer filling process in nanoimprint lithography

著录项

• 来源
  《Microelectronic Engineering》 |2011年第8期|p.2188-2191|共4页
• 作者

  Masaaki Yasuda; Kosei Araki; Akihiro Taga; Akira Horiba; Hiroaki Kawata; Yoshihiko Hirai;

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• 作者单位

  Department of Physics and Electronics, Osaka Prefecture University, Sakai, Osaka 599-8531, Japan JST - CREST, Kawaguchi, Saitama 332-0012, Japan Department of Physics and Electronics, Osaka Prefecture University, Sakai. Osaka 599-8531, Japan;

  Department of Physics and Electronics, Osaka Prefecture University, Sakai, Osaka 599-8531, Japan JST - CREST, Kawaguchi, Saitama 332-0012, Japan;

  Department of Physics and Electronics, Osaka Prefecture University, Sakai, Osaka 599-8531, Japan JST - CREST, Kawaguchi, Saitama 332-0012, Japan;

  Department of Physics and Electronics, Osaka Prefecture University, Sakai, Osaka 599-8531, Japan JST - CREST, Kawaguchi, Saitama 332-0012, Japan;

  Department of Physics and Electronics, Osaka Prefecture University, Sakai, Osaka 599-8531, Japan JST - CREST, Kawaguchi, Saitama 332-0012, Japan;

  Department of Physics and Electronics, Osaka Prefecture University, Sakai, Osaka 599-8531, Japan JST - CREST, Kawaguchi, Saitama 332-0012, Japan;

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• 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  nanoimprint; molecular dynamics; polymer; pattern geometry;

  机译：纳米压印;分子动力学;聚合物;图案几何;