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Roller nanoimprint lithography for flexible electronic devices of a sub-micron scale

机译：用于亚微米级的柔性电子设备的辊式纳米压印光刻

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摘要

This paper proposes a new concept of a RNIL (roller nanoimprint lithography) system. The system does not require the roll stamp that is necessary in the conventional RNIL system, and it easily transfers patterns from a hard stamp to a flexible substrate. Generally, hard stamps such as Si wafers are of a circular shape. While imprinting with a hard stamp using the RNIL system, the pressing force of the press roller in the system varies as the length of the contact line between the circular-type hard stamp and the roller changes. In this study, the contact force profile is presented and is then implemented. Micro- and nano-scale patterns are transferred from Si stamps onto thin and flexible PC (polycarbonate) substrates. Then performance of the system is the evaluated by SEM images.
机译：本文提出了RNIL（辊子纳米压印光刻）系统的新概念。该系统不需要传统RNIL系统中必需的辊压模，并且可以轻松地将图案从硬模转印到柔性基板上。通常，诸如Si晶片的硬压模是圆形的。当使用RNIL系统在硬压印上进行压印时，系统中压辊的压力会随着圆形硬压印与辊之间的接触线长度的变化而变化。在这项研究中，提出并执行了接触力曲线。微米和纳米级图案从Si压模转移到薄且柔性的PC（聚碳酸酯）基板上。然后通过SEM图像评估系统的性能。

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  • 来源
    《Microelectronic Engineering》 |2011年第8期|p.2017-2020|共4页
  • 作者

    Hyungjun Lim; Kee-Bong Choi; GeeHong Kim; SooYeon Park; JiHyeong Ryu; JaeJong Lee;

  • 作者单位

    Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials, 171 Jang-dong, Yuseong-gu, Daejeon 305-343, South Korea;

    Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials, 171 Jang-dong, Yuseong-gu, Daejeon 305-343, South Korea;

    Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials, 171 Jang-dong, Yuseong-gu, Daejeon 305-343, South Korea;

    Department of Nano Mechatronics, University of Science and Technology, 52 Eoeun-dong, Yuseong-gu, Daejeon 305-807, South Korea;

    Department of Nano Mechatronics, University of Science and Technology, 52 Eoeun-dong, Yuseong-gu, Daejeon 305-807, South Korea;

    Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials, 171 Jang-dong, Yuseong-gu, Daejeon 305-343, South Korea Department of Nano Mechatronics, University of Science and Technology, 52 Eoeun-dong, Yuseong-gu, Daejeon 305-807, South Korea Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials. 171 Jang-dong,Yuseong-gu, Daejeon 305-343, South Korea;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    nanoimprint lithography (nil); roller nanoimprint lithography (rnil); flexible substrate;

    机译：纳米压印光刻（nil）;辊式纳米压印光刻（nil）;柔性基板;

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