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首页> 外文期刊>Nuclear Instruments & Methods in Physics Research >Instrumental developments for in situ breakdown experiments inside a scanning electron microscope
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Instrumental developments for in situ breakdown experiments inside a scanning electron microscope

机译：扫描电子显微镜内原位击穿实验的仪器开发

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Electrical discharges in accelerating structures are one of the key issues limiting the performance of future high energy accelerators such as the Compact Linear Collider (CLIC). Fundamental understanding of breakdown phenomena is an important part of the CLIC feasibility study. The present work concerns the experimental study of breakdown using Scanning Electron Microscopes (SEMs). An SEM gives us the opportunity to achieve high electrical gradients of 1 kV/um which corresponds to 1 GV/m by exciting a probe needle with a high voltage power supply and controlling the positioning of the needle with a linear piezo motor. The gap between the needle tip and the surface is controlled with sub-micron precision. A second electron microscope equipped with a Focused Ion Beam (FIB) is used to create surface corrugations and to sharpen the probe needle to a tip radius of about SO nm. Moreover it is used to prepare cross-sections of a voltage breakdown area in order to study the geometrical surface damages as well as the elemental composition of the breakdown.
机译：加速结构中的放电是限制诸如紧凑型线性对撞机（CLIC）之类的未来高能加速器性能的关键问题之一。对故障现象的基本理解是CLIC可行性研究的重要组成部分。本工作涉及使用扫描电子显微镜（SEM）进行击穿的实验研究。 SEM通过激励带有高压电源的探针并通过线性压电马达控制探针的位置，从而使我们有机会实现1 kV / um的高电气梯度（相当于1 GV / m）。针尖与表面之间的间隙以亚微米精度控制。配备聚焦离子束（FIB）的第二台电子显微镜用于产生表面波纹并将探针尖锐化到大约SO nm的尖端半径。此外，它用于准备电压击穿区域的横截面，以便研究几何表面损坏以及击穿的元素组成。

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