首页> 外文期刊>Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms >Comparison among the formation processes of extended defects in Si under irradiation with low-energy H~+, He~+ ions and high-energy electrons
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Comparison among the formation processes of extended defects in Si under irradiation with low-energy H~+, He~+ ions and high-energy electrons

机译:低能H〜+,He〜+离子和高能电子辐照下硅中扩展缺陷形成过程的比较

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摘要

Formation processes and characteristics of platelet-like extended defects in FZ Si under the irradiation with low-energy H~+ ions are examined, and the results are compared with those from He~+ ion and high-energy electron irradiation. Silicon discs with (011) surfaces are irradiated by 5 keV H~+, 10 keV He~+ ions between 570 and 870 K, and by 1000 keV electrons between 470 and 670 K. It is considered from the temperature dependence of the characteristics of extended defects induced by H~+ ion irradiation, that the interaction between self-interstitial atoms and hydrogen becomes weak above 770 K. The formation of {113} interstitial-type defects is enhanced by hydrogen and helium, and the degree is stronger for hydrogen. It is concluded from the difference between aspect ratios of {113} defects induced by the irradiation with both kinds of ions, that the mechanism for the enhancement by hydrogen is different from that by helium.
机译:研究了低能H〜+离子辐照下FZ Si片状扩展缺陷的形成过程和特性,并将其与He〜+离子和高能电子辐照的结果进行了比较。表面(011)的硅圆片受到570至870 K之间的5 keV H〜+,10 keV He〜+离子和470至670 K之间的1000 keV电子的辐照。 H〜+离子辐照引起的扩展缺陷,自填原子与氢之间的相互作用在770 K以上变得较弱。{113}填隙型缺陷的形成被氢和氦增强,氢的程度更强。由两种离子辐照引起的{113}缺陷的纵横比之间的差异可以得出结论,氢的增强机理与氦的增强机理不同。

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