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A high-sensitivity optical fiber relative humidity sensor based on microsphere WGM resonator

机译：基于微球WGM谐振器的高灵敏度光纤相对湿度传感器

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摘要

In this paper, we proposed and experimentally demonstrated a high-sensitivity optical fiber relative humidity (RH) sensor, which consists of a tapered fiber and a silica microsphere resonator, for excitation of Whispering Gallery Modes (WGMs). Whispering gallery modes in the microsphere (200 mu m) resonator are excited by evanescent coupling using the tapered fiber with similar to 2.1 mu m waist diameter. The variation of surrounding RH will induce the effective refractive index and coupling efficiency of the microsphere change, and result in transmission spectra change finally. Studies of the RH response sensitivity, the repeatability, long-term stability and temperature dependence of the proposed sensor are carried out. The sensitivity achieved in our experiments was 0.11 dB/%RH in the RH range from 20% to 70%, and 0.21 dB/% RH in the RH range from 70% to 90%. The proposed sensor with the advantages of compact size, high sensitivity, low hysteresis, good repeatability, and low cross sensitivity to temperature has good application prospects.
机译：在本文中，我们提出并通过实验证明了一种高灵敏度的光纤相对湿度（RH）传感器，该传感器由锥形光纤和二氧化硅微球谐振器组成，用于激发回音壁模式（WGM）。微球（200微米）谐振器中的回音壁模式通过使用与腰部直径相似的2.1微米的锥形光纤通过e逝耦合而激发。周围RH的变化将引起有效折射率和微球耦合效率的变化，最终导致透射光谱的变化。研究了拟议传感器的RH响应灵敏度，可重复性，长期稳定性和温度依赖性。在我们的实验中，在20％至70％的RH范围内达到的灵敏度为0.11 dB /％RH，在70％至90％的RH范围内达到0.21 dB /％RH。所提出的传感器具有体积小，灵敏度高，滞后性低，可重复性好以及对温度的交叉敏感性低的优点，具有良好的应用前景。

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