High‐temperature substage for a scanning electron microscope

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High‐temperature substage for a scanning electron microscope

机译：扫描电子显微镜的高温台

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The construction and operation of a high‐temperature substage for a scanning electron microscope (SEM) is described. The substage is designed to be inexpensive, compatible with a wide variety of electron microscopes, and provide for a wide range of heating and cooling rates in the 25°–800 °C range. The advantages of this substage over commercially available models are discussed. The substage was used to observe morphological and metallurgical changes during the formation of ohmic contacts to GaAs.

机译：描述了用于扫描电子显微镜（SEM）的高温子台的构造和操作。该子平台价格便宜，可与各种电子显微镜兼容，并能在25°–800°C范围内提供多种加热和冷却速率。讨论了该子阶段相对于商用模型的优势。该子阶段用于观察与GaAs的欧姆接触形成过程中的形貌和冶金学变化。

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《Review of Scientific Instruments》 |1984年第6期|P.925-927|共3页
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High‐temperature substage for a scanning electron microscope

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