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An Express Method of Measurements of Parameters of Technological Electron Beams

机译:电子束参数的快速测量方法

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摘要

An express method of direct measurements of the current density distribution of axially symmetric electron beams is proposed. It is shown that use of the technique is urgently needed to improve the reproduc-ibility of the results of electron-beam processing. Comparative analysis of existing methods to measure the parameters of electron beams used for technological purposes is carried out. A technique to restore a radial distribution of electron beam current density as well as a device to implement the technique is developed. The results of radial distribution recovery are analyzed in the case in which the initial distribution is given in the form of a model function of normal distribution. An algorithm to determine estimated sizes of the area within which spatial distribution discretization is carried out is developed. Based on analysis of the experimental dependences, it is shown that the suggested numerical method can be applied to all types of axial-symmetric distributions. The nature of errors occurring after distribution function recovery is analyzed. A technological projection of express diagnostic systems for the processing electron beams is made taking into account parameters of the existing element base.
机译:提出了一种直接测量轴对称电子束电流密度分布的快速方法。结果表明,迫切需要使用该技术来提高电子束处理结果的可再现性。对用于测量用于技术目的的电子束参数的现有方法进行了比较分析。开发了恢复电子束电流密度的径向分布的技术以及实现该技术的装置。在以正态分布的模型函数形式给出初始分布的情况下,分析径向分布恢复的结果。开发了一种确定执行空间分布离散化的区域的估计大小的算法。在对实验相关性进行分析的基础上,表明所提出的数值方法可以应用于所有类型的轴对称分布。分析了分布函数恢复后发生的错误的性质。考虑到现有元素库的参数,对用于处理电子束的快速诊断系统进行了技术预测。

著录项

  • 来源
    《Russian electrical engineering》 |2016年第8期|487-492|共6页
  • 作者单位

    National Research University Moscow Power Engineering Institute (MPEl), ul. Krasnokazarmennaya 17, Moscow, 111250 Russia;

    National Research University Moscow Power Engineering Institute (MPEl), ul. Krasnokazarmennaya 17, Moscow, 111250 Russia;

    National Research University Moscow Power Engineering Institute (MPEl), ul. Krasnokazarmennaya 17, Moscow, 111250 Russia;

    National Research University Moscow Power Engineering Institute (MPEl), ul. Krasnokazarmennaya 17, Moscow, 111250 Russia;

    National Research University Moscow Power Engineering Institute (MPEl), ul. Krasnokazarmennaya 17, Moscow, 111250 Russia;

    National Research University Moscow Power Engineering Institute (MPEl), ul. Krasnokazarmennaya 17, Moscow, 111250 Russia;

  • 收录信息 美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    electron-beam technology; measuring devices; data acquisition system; particle beam diagnostics;

    机译:电子束技术测量设备;数据采集​​系统;粒子束诊断;

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