Structural characterisation of anodic SiO<sub>2</sub> thin films on n-type Si

Woon W.S.; Hutagalung S.D.; Cheong K.Y.

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Structural characterisation of anodic SiO₂ thin films on n-type Si

机译：n型Si上阳极SiO _{2 薄膜的结构表征}

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This article presents the results of anodic silicon dioxide (SiO₂) thin film on n-type silicon substrate. A mixture of nitric acid and deionised water has been used as the electrolyte for the anodisation process. The effects of supplied voltage and oxidation time on the structural properties of film have been investigated. It has found that thickness, refractive index, density, porosity and dielectric constant of the anodised film are depending on the investigated parameters. Defect free anodic oxide with morphology of round shape spikes has been successfully grown on the substrate.

机译：本文介绍了在n型硅衬底上制备阳极二氧化硅（SiO _{2 ）薄膜的结果。硝酸和去离子水的混合物已被用作阳极氧化工艺的电解质。研究了供电电压和氧化时间对薄膜结构性能的影响。已经发现，阳极氧化膜的厚度，折射率，密度，孔隙率和介电常数取决于所研究的参数。具有圆形尖峰形态的无缺陷阳极氧化物已成功地在基底上生长。}

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《Surface Engineering》 |2008年第5期|p.388-391|共4页
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Woon W.S.; Hutagalung S.D.; Cheong K.Y.;
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1. Structural characterisation of anodic SiO_2 thin films on n-type Si [J] . W. S. Woon Surface Engineering . 2008,第5期

机译：n型Si上阳极SiO_2薄膜的结构表征
2. A novel synthesis of Zn_2SiO_4 thin film on n-type ZnO semiconductor electrode and its electrochemical luminescence under the anodic polarization [J] . T. Ohtake, K. Ohkawa, N. Sonoyama Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics . 2006,第1a2期

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3. SiO_χNT_y thin films deposited by reactive sputtering: Process study and structural characterisation [J] . F. Rebib, E. Tomasella, M. Dubois, Thin Solid Films . 2007,第7a8期

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4. Electronic and structural properties of n-type microcrystalline silicon oxide (μe-SiO_x:H) films for applications in thin film silicon solar cells [C] . V. Smirnov, A. Lambertz, F. Finger EMRS Meeting on Advanced Inorganic Materials and Structures for Photovoltaics . 2016

机译：薄膜硅太阳能电池应用N型微晶氧化硅（μE-SiO_x：H）薄膜的电子和结构性能
5. Structural Characterisation of Complex Oxide & Rare Earth Manganite Thing Films by Microscopy. [D] . Jehanathan, Neerushana. 2011

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6. Three dimensional-stacked complementary thin-film transistors using n-type Al:ZnO and p-type NiO thin-film transistors [O] . Ching-Ting Lee, Chia-Chi Chen, Hsin-Ying Lee -1

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7. Electronic and Structural Properties of N-Type Microcrystalline Silicon Oxide (Mc-Siox:H) Films for Applications in Thin Film Silicon Solar Cells [O] . Smirnov V., Lambertz A., Finger F. 2015

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8. Structural and interfacial characteristics of thin (<10 nm) SiO(sub 2) films grown by electron cyclotron resonance plasma oxidation on (100) Si substrates. [R] . T. D. Nguyen D. A. Carl D. W. Hess M. A. Lieberman R. Gronsky 1991

机译：通过电子回旋共振等离子体氧化在（100）si衬底上生长的薄（<10nm）siO（sub 2）膜的结构和界面特性。

Structural characterisation of anodic SiO2 thin films on n-type Si

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Structural characterisation of anodic SiO₂ thin films on n-type Si