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Thin film chemical sensors based on p-CuO-ZnO heterocontacts

机译:基于p-CuO / n-ZnO异质接触的薄膜化学传感器

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摘要

Previous work on bulk ceramic heterocontacts (n-ZnO/p-CuO) has indicated significant sensitivity to the presence of specific adsorbed chemical species. Here, these results are extended to thin film heterostructures fabricated via chemical solution methods. It is expected that thin film sensor architectures will possess significant advantages over their bulk counterparts. In this study, the desired properties of porosity and crystallinity have been optimized with respect to pyrolysis temperature for each ZnO and CuO sol-gel process. The results of microscopy and X-ray diffraction (XRD) indicated that an optimal balance of these two properties is achieved at a pyrolysis temperature of 250 ℃. The CuO films were seen to possess a level of porosity significantly higher than that seen in the ZnO films, making them an ideal candidate for the top layer in a planar thin film heterostructure. Results of current-voltage measurements conducted in 4000 ppm hydrogen have confirmed that the inherent porosity of the CuO films led to an enhanced sensor response in CuO on ZnO heterostructures. Lastly, the fabrication and structural characterization of a mixed solution type heterostructure has been detailed. Atomic force microscopy and XRD data indicated the presence of ZnO pillars dispersed among a matrix of CuO.
机译:以前对块状陶瓷异质接触(n-ZnO / p-CuO)的研究表明,对特定吸附化学物质的存在非常敏感。在这里,这些结果扩展到通过化学溶液法制造的薄膜异质结构。预计薄膜传感器架构将比它们的同类产品具有显着的优势。在这项研究中,针对每种ZnO和CuO溶胶-凝胶工艺的热解温度,已优化了所需的孔隙率和结晶性。显微镜和X射线衍射(XRD)的结果表明,在250℃的热解温度下,这两种性能达到了最佳平衡。可以看出,CuO薄膜的孔隙度明显高于ZnO薄膜,这使其成为平面薄膜异质结构中顶层的理想候选者。在4000 ppm氢气中进行的电流-电压测量结果已经证实,CuO膜的固有孔隙率导致ZnO异质结构上CuO的传感器响应增强。最后,详细描述了混合溶液型异质结构的制造和结构表征。原子力显微镜和XRD数据表明ZnO柱存在于CuO基质中。

著录项

  • 来源
    《Thin Solid Films》 |2009年第15期|4448-4454|共7页
  • 作者单位

    Materials Science Program, School of Mechanical, Industrial, and Manufacturing Engineering, Oregon State University, Corvallis, OR, 97331, USA;

    Materials Science Program, School of Mechanical, Industrial, and Manufacturing Engineering, Oregon State University, Corvallis, OR, 97331, USA;

    Materials Science Program, School of Mechanical, Industrial, and Manufacturing Engineering, Oregon State University, Corvallis, OR, 97331, USA;

    School of Electrical Engineering and Computer Science, Oregon State University, Corvallis, OR, 97331, USA;

    Materials Science Program, School of Mechanical, Industrial, and Manufacturing Engineering, Oregon State University, Corvallis, OR, 97331, USA;

    Materials Science Program, School of Mechanical, Industrial, and Manufacturing Engineering, Oregon State University, Corvallis, OR, 97331, USA;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    zinc oxide; copper oxide; gas sensor; sol-gel; heterostructures;

    机译:氧化锌氧化铜气体传感器溶胶凝胶异质结构;

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