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Physical vapor deposition of copper over Lexan

机译：铜在Lexan上的物理气相沉积

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Lexan is a polymer which is light-weight and extremely smooth, and is a candidate material for radio-frequency reflecting mirrors provided that they are coated with strongly adherent copper coatings. In the present investigation copper was sputtered from a dc magnetron source and deposited on Lexan surfaces. Various pretreatments were given to the Lexan surface, e.g., being exposed to pulsed dc or rf argon plasma. During deposition the Lexan surface was biased to various pulsed voltages ranging upto -5 kV with various repetition rates and on times. All these parameters decide whether the copper coatings are strongly adherent to the Lexan surface. The results indicate that the coatings deposited over pretreated (etched) substrates showed better adhesion to the Lexan surface and the deposited coatings in general exhibit compressive stress. XRD studies revealed polycrystalline coatings with nano-sized grains and having a preferred (111) orientation.
机译：Lexan是一种重量轻且极其光滑的聚合物，并且是射频反射镜的候选材料，只要它们涂有牢固附着的铜涂层即可。在本研究中，从直流磁控管源溅射出铜，并将其沉积在Lexan表面上。对Lexan表面进行了各种预处理，例如使其暴露于脉冲直流或RF氩等离子体中。在沉积过程中，Lexan表面以各种重复率和导通时间被偏压到高达-5 kV的各种脉冲电压。所有这些参数决定了铜涂层是否牢固地粘附在Lexan表面上。结果表明，沉积在预处理（蚀刻）基材上的涂层对Lexan表面表现出更好的附着力，并且沉积的涂层通常表现出压应力。 XRD研究表明，多晶涂层具有纳米尺寸的晶粒，并具有较好的（111）取向。

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