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Modelling of microwave plasma sources: potential and applications

机译：微波等离子体源的建模：潜力和应用

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Low-temperature, non-equilibrium plasmas form the basis of a growing variety of plasma-related processes. The demand for high-density plasmas over a wide pressure range has stimulated the development and use of microwave plasma sources in the last few years. Depending on the specific application, quite different and specialized sources have emerged. Other than empirical trial and error methods, computer simulations drastically reduce the time and effort needed to optimize the power coupling and distribution into a given gas. The computation of electromagnetic fields in plasma sources, including the plasma as a lossy dielectric, is a practical (though not self-consistent) approach yielding valuable insight on a short time-scale. Finite integral methods (FIMs) have proven to be powerful tools because they may be interpreted as a discrete analogue representation of Maxwell's equations in the computational grid. We have already developed and optimized a whole family of slot antenna microwave plasma sources (SLANs) based on such an approach. Our work included three-dimensional numerical simulations of the coupling structures and impedance matching in the time and frequency domains. For the smallest source mu SLAN geometry-dependent resonances were also identified, suppressed or enhanced to improve plasma ignition and power coupling. In that case the driving force was to use these sources more efficiently for time-modulated power flow, which is becoming very attractive for advanced plasma-based materials processing. The insight gained from our smallest source type mu SLAN has also been successfully applied to model larger plasma sources with diameters of up to more than 0.5 m and predict their performance at realistic working parameters before construction. Examples of these approaches as well as performance data will be given. [References: 23]
机译：低温非平衡等离子体形成了与等离子体相关的各种工艺的基础。在过去的几年中，对宽压力范围内的高密度等离子体的需求刺激了微波等离子体源的开发和使用。根据具体的应用，已经出现了完全不同的专门来源。除了经验性的试验和错误方法外，计算机模拟还大大减少了优化功率耦合和分配给给定气体所需的时间和精力。等离子体源中的电磁场（包括作为有损电介质的等离子体）的计算是一种实用的（尽管不是自洽的）方法，可在短时间内产生有价值的见解。有限积分方法（FIM）已被证明是功能强大的工具，因为它们可能被解释为计算网格中麦克斯韦方程组的离散模拟表示。我们已经基于这种方法开发并优化了整个缝隙天线微波等离子体源（SLAN）系列。我们的工作包括时域和频域中耦合结构和阻抗匹配的三维数值模拟。对于最小的源，还识别，抑制或增强了μSLAN依赖于几何的共振，以改善等离子体点火和功率耦合。在那种情况下，驱动力是将这些源更有效地用于时间调制的功率流，这对于先进的基于等离子体的材料处理变得非常有吸引力。从我们最小的源mu SLAN类型获得的见解也已成功地用于对直径最大为0.5 m以上的较大等离子源进行建模，并在施工前预测其在实际工作参数下的性能。将给出这些方法的示例以及性能数据。 [参考：23]

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