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Formation of p—n junctions and ohmic contacts with GaAs by laser solid-phase diffusion

机译:激光固相扩散与GaAs形成PN结和欧姆接触

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摘要

An experimental investigation was made of the electrophysical properties of p—n junctions and ohmic contacts formed by laser solid-phase diffusion of, respectively, zinc and a contact group of elements (Au—Au : Ge) in a plate of n-type GaAs. The diffusion was induced by radiation from a cw CO2 laser. The zero-bias resistance of the p—n junctions was ~10~(10) Ω and the leakage current did not exceed 1 nA under a reverse bias voltage of 8 V. A typical resistance of the nonrectifying contacts was 5*10~(-7) Ω cm~2.
机译:对n型GaAs板中锌和元素的接触基团(Au-Au:Ge)分别进行激光固相扩散而形成的p-n结和欧姆接触的电物理性质进行了实验研究。扩散是由连续二氧化碳激光器发出的辐射引起的。 p-n结的零偏置电阻为〜10〜(10)Ω,在8 V的反向偏置电压下,漏电流不超过1 nA。非整流触点的典型电阻为5 * 10〜( -7)Ωcm〜2。

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