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Imaging of radiation-sensitive samples in transmission electron microscopes equipped with Zernike phase plates

机译:配备Zernike相板的透射电子显微镜中辐射敏感样品的成像

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摘要

We have optimized a bright-field transmission electron microscope for imaging of high-resolution radiation-sensitive materials by calculating the imaging dose n_0 needed to obtain a signal-to-noise ratio (SNR) = 5. Installing a Zernike phase plate (ZP) decreases the dose needed to detect single atoms by as much as a factor of two at 300 kV. For imaging larger objects, such as Gaussian objects with full-width at half-maximum larger than 0.15 nm, ZP appears more efficient in reducing the imaging dose than correcting for spherical aberration. The imaging dose n_0 does not decrease with extending of chromatic resolution limit by reducing chromatic aberration, using high accelerating potential (U_ 0= 300 kV), because the image contrast increases slower than the reciprocal of detection radius. However, reducing chromatic aberration would allow accelerating potential to be reduced leading to imaging doses below 10 e~-/A~2 for a single iodine atom when a CS-corrector and a ZP are used together. Our simulations indicate that, in addition to microscope hardware, optimization is heavily dependent on the nature of the specimen under investigation.
机译:通过计算获得信噪比(SNR)= 5所需的成像剂量n_0,我们优化了用于高分辨率辐射敏感材料成像的明场透射电子显微镜。安装Zernike相板(ZP)在300 kV时,将检测单个原子所需的剂量降低了两倍。对于成像较大的物体(例如半高全宽大于0.15 nm的高斯物体),ZP在减少成像剂量方面比校正球差更有效。使用高加速电位(U_0 = 300 kV),通过降低色差,成像剂量n_0不会随着色分辨率极限的扩展而降低,因为图像对比度的增加速度比检测半径的倒数慢。然而,当CS校正器和ZP一起使用时,减小色差将允许减小加速电位,从而导致单个碘原子的成像剂量低于10 e-// A-2。我们的模拟表明,除显微镜硬件外,优化还很大程度上取决于所研究样品的性质。

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