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首页> 外文期刊>Technical physics letters: Letters to the Russian journal of applied physics >Low-voltage field emission from carbon films produced by magnetron sputtering
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Low-voltage field emission from carbon films produced by magnetron sputtering

机译:磁控溅射产生的碳膜的低压场发射

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摘要

Emission properties of carbon films deposited on silicon substrates by magnetron sputtering have been studied. The structure of the films was varied by changing the substrate temperature. It was found that the best emission properties are obtained for a coating constituted by graphitized islands with transverse dimensions of 30-40 nm and a thickness of 3-4 nm. This result is in good agreement with the data previously obtained for films formed by chemical vapor deposition. This suggests that it is the structure of a carbon coating that determines its emission properties. A model of the emission mechanism for films of the type under study is discussed.
机译:研究了通过磁控溅射沉积在硅衬底上的碳膜的发射特性。通过改变基板温度来改变膜的结构。已经发现,对于由具有30-40nm的横向尺寸和3-4nm的厚度的石墨化岛构成的涂层而言,获得了最佳的发射性能。该结果与先前通过化学气相沉积形成的膜获得的数据高度吻合。这表明,决定其发射性能的是碳涂层的结构。讨论了所研究类型的电影的发射机理模型。

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