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首页> 外文期刊>Chemistry of Materials: A Publication of the American Chemistry Society >Evaluation of Homoleptic Guanidinate and Amidinate Complexes of Gadolinium and Dysprosium for MOCVD of Rare-Earth Nitride Thin Films
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Evaluation of Homoleptic Guanidinate and Amidinate Complexes of Gadolinium and Dysprosium for MOCVD of Rare-Earth Nitride Thin Films

机译：Ho和Guan的胍基和氨基Am酸酯配合物用于稀土氮化物薄膜MOCVD的评价

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摘要

Metal-organic chemical vapor deposition (MOCVD) of thin films of two representative rare-earth nitrides is reported here for the first time. Four homoleptic, all-nitrogen-coordinated, rare-earth (RE) complexes were evaluated as precursors for the respective nitride thin film materials. Two guanidinato complexes [RE{(~iPrN)_2C(NMe2)}_3] [RE = Gd (1), Dy (2)] and two amidinato complexes [RE{(~iPrN)_2CMe}_3] [RE = Gd (3), Dy (4)] were compared and used either as single source precursors or together with ammonia for MOCVD of gadolinium nitride (GdN) and dysprosium nitride (DyN), respectively. The thermal properties of the precursors were studied and the fragmentation patterns were characterized by high-resolution electron impact-mass spectrometry (HR EI-MS). The obtained nitride films were investigated using a series of techniques, including X^ray diffraction (XRD), scanning electron microscopy (SEM), nuclear reaction analysis (NRA), Rutherford backscattering (RBS), and X-ray photoelectron spectroscopy (XPS). The films contain preferentially oriented grains of fcc-GdN and DyN and are contaminated with small amounts of carbon and oxygen (significantly below 10 at. % in the best cases). The temperature-dependent magnetic properties of the films, as measured using a superconducting quantum interference device (SQUID), suggest the existence of small ferromagnetic grains of the rare-earth nitrides mat exhibit superparamagnetism. Despite the chemical and structural similarity of the guanidinato and amidinato complexes (1-4), a distinctly different behavior as MOCVD precursors was found for 1 and 2, compared with that for 3 and 4. While the guanidinates operate well as single-source precursors (SSPs), the amidinates are not suited at all as SSPs, but give very good nitride films when used in the presence of ammonia. This characteristic behavior was correlated with the different fragmentation mechanisms, as revealed by EI-MS.
机译：首次报道了两种代表性稀土氮化物薄膜的金属有机化学气相沉积（MOCVD）。评价了四种均氮，全氮配位的稀土（RE）配合物作为相应氮化物薄膜材料的前体。两个胍基络合物[RE {（〜iPrN）_2C（NMe2）} _ 3] [RE = Gd（1），Dy（2）]和两个酰胺基络合物[RE {（〜iPrN）_2CMe} _3] [RE = Gd（ 3），Dy（4）]进行了比较，并分别用作单一来源的前驱物或与氨一起用于MOCVD氮化g（GdN）和氮化s（DyN）。研究了前体的热性质，并通过高分辨率电子冲击质谱（HR EI-MS）表征了碎片模式。使用一系列技术研究获得的氮化物膜，包括X射线衍射（XRD），扫描电子显微镜（SEM），核反应分析（NRA），卢瑟福背散射（RBS）和X射线光电子能谱（XPS） 。薄膜包含优先取向的fcc-GdN和DyN晶粒，并被少量的碳和氧（在最佳情况下，显着低于10 at。％）污染。使用超导量子干涉仪（SQUID）测量的薄膜的温度相关磁性能表明，稀土氮化物垫层中存在小的铁磁性晶粒，表现出超顺磁性。尽管胍基和a胺基配合物（1-4）在化学和结构上相似，但与3和4相比，发现1和2的MOCVD前体的行为明显不同。 （SSP），the酰胺根本不适合用作SSP，但在氨存在下使用时会产生非常好的氮化膜。如EI-MS所揭示的，该特征行为与不同的片段化机制相关。

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