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Effects of oxygen and hydrogen on electron field emission from microwave plasma chemically vapor deposited microcrystalline diamond, nanocrystalline diamond, and glassy carbon coatings

机译:氧和氢对微波等离子体化学气相沉积的微晶金刚石,纳米晶金刚石和玻璃碳涂层的电子场发射的影响

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摘要

Electron field emission from chemically vapor deposited polycrystalline diamond, nanocrystalline diamond, and glassy carbon coatings are reported. Effects of hydrogen-rich or oxygen-containing CVD precursors on electron field emission from CVD carbon coatings are presented. Surface conductivity and negative electron affinity resulting from hydrogen termination of crystalline diamond were found to promote electron field emission for discrete diamond particles and non-continuous diamond films but not for high quality and continuous diamond films as well as nanocrystalline diamond and glassy carbon coatings containing conductive graphitic carbon. Graphitic carbon in nanocrystalline diamond coatings and glassy carbon coatings provided additional conduction paths for electrons and allowed more effective injection of electrons into electron emitters. Nanocrystalline diamond coatings deposited by methanol/ethanol plasmas contained more graphitic carbon than that deposited by hydrogen/methane plasmas resulting in lower turn-on electric field and higher electron field emission current. Glassy carbon coatings deposited by both processes exhibited excellent electron emission characteristics. Low turn-on electric field, i.e., 1 V/μm, for electron field emission was achieved for diamond and glassy carbon coatings deposited under optimized conditions. Among these three classes of carbon coatings, glassy carbon deposited at elevated substrate temperatures were found to exhibit the best electron field emission properties.
机译:据报道,化学气相沉积的多晶金刚石,纳米晶金刚石和玻璃碳涂层的电子场发射。提出了富氢或含氧的CVD前体对CVD碳涂层的电子场发射的影响。发现由结晶金刚石的氢封端产生的表面电导率和负电子亲和力可促进离散金刚石颗粒和非连续金刚石膜的电子场发射,但对于高质量和连续金刚石膜以及包含导电性的纳米晶金刚石和玻璃碳涂层,则不能促进电子场发射石墨碳。纳米晶金刚石涂层和玻璃碳涂层中的石墨碳为电子提供了额外的传导路径,并允许更有效地将电子注入电子发射器。甲醇/乙醇等离子体沉积的纳米晶金刚石涂层比氢/甲烷等离子体沉积的石墨碳含量更高,从而导致较低的开启电场和较高的电子场发射电流。通过两种方法沉积的玻璃碳涂层均表现出优异的电子发射特性。对于在优化条件下沉积的金刚石和玻璃碳涂层,实现了用于电子场发射的低导通电场,即1 V /μm。在这三类碳涂层中,发现在升高的基材温度下沉积的玻璃碳具有最佳的电子场发射性能。

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