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Electrical characterization of electron irradiated X-rays detectors based on 4H-SiC epitaxial layers

机译:基于4H-SiC外延层的电子辐照X射线探测器的电学表征

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摘要

In this work, we report and discuss the results of minority carriers diffusion length measurements carried out in order to quantify the radiation damage induced by electron irradiation of X-rays detectors based on a metal-silicon carbide junction. The devices examined consisted of 4H-SiC n-type epitaxial layers on 4H-SiC n~+-type substrate wafers, on which Schottky contacts were formed by gold deposition. The minority carriers diffusion length, extracted from the results of photocurrent measurements using a fitting procedure, was shown to exhibit a strong decrease with the radiation dose.
机译:在这项工作中,我们报告并讨论了少数载流子扩散长度测量的结果,以量化由基于金属-碳化硅结的X射线探测器的电子辐照引起的辐射损伤。被检查的器件由4H-SiC n〜+型衬底晶片上的4H-SiC n型外延层组成,在其上通过金沉积形成肖特基接触。使用拟合程序从光电流测量结果中提取的少数载流子扩散长度显示出随辐射剂量的强烈降低。

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