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首页> 外文期刊>Journal of Electronic Materials >Phase Transformations in Thermally Exposed Au-AI Ball Bonds
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Phase Transformations in Thermally Exposed Au-AI Ball Bonds

机译：热暴露的Au-AI球形键的相变

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Gold-aluminum ball bonds were thermally exposed at constant elevated temperatures,and the resultant phase transformations studied in detail.The as-bonded microstructure of a Au-AI ball bond essentially consisted of a reaction zone (termed "alloyed zone" (AZ) in the as-bonded condition) between the Au bump and the bonded Al metallization.It is the growth of the reaction zone between the Au bump and the bonded Al metallization and also the nonbonded Al metallization during thermal exposure that gave rise to the various phase transformations.Au_4Al,Au_8Al_3,and Au_2Al are the predominant phases that grew across the ball bond until the bonded Al metallization is available to take part in the interdiffusion reactions.After the complete consumption of the bonded Al metallization,the Au-AI phases reverse transformed resulting in the formation of the Au_4Al phase in the entire reaction zone across the ball bond (RZ-A).The lateral interdiffusion reactions resulted in the nucleation and the growth of all of the Au-AI phases given by the phase diagram.Kidson's analysis and Tu et al.'s treatment were extended to a five-phase binary system to explain the phase transformations in thermally exposed Au-AI ball bonds.It is possible for all of the Au-AI phases to grow across a ball bond uninhibited as long as the bonded metallization is available.However,the supply limitation of the bonded metallization gives rise to reverse transformations where Al-rich phases transform to Au-rich phases and eventually result in the formation of the Au_4Al phase in the entire RZ-A.If infinite time is allowed,Au_4Al would dissolve; the extent of which is dependent on the solubility of Al in Au.No supply of Au lateral to the bond causes the reverse transformation of the Au_4Al phase,giving rise to the lateral growth of the remaining Au-AI phases.If infinite time is allowed,the lateral phase transformations would result in the formation of a phase that is dependant on the relative proportion of Au and Al present in the nonbonded metallization (NBM) and Au_4Al below the void line.Hence,the presence of a phase in a particular location of a ball bond is dependent on the time and temperature of thermal exposure.
机译：金铝球键在恒定的高温下进行热暴露，并详细研究了由此产生的相变。Au-Al球键的键合微观结构主要由一个反应区（称为“合金区”（AZ））组成。凸点和键合的Al金属化之间的键合条件）。正是由于金凸点和键合的Al金属化之间的反应区的生长以及热暴露过程中非键合的Al金属化之间的反应区的增长，引起了各种相变.Au_4Al，Au_8Al_3和Au_2Al是在整个球键上生长的主要相，直到键合的Al金属化可用于相互扩散反应为止。在键合Al金属化的完全消耗之后，Au-Al相发生了反向转化在整个球键（RZ-A）的整个反应区中形成Au_4Al相。横向相互扩散反应导致成核和生长相图给出了所有Au-Al相的数量。基德森的分析和Tu等人的研究扩展到了五相二元体系，以解释热暴露的Au-AI球键的相变。只要有键合金属化层，所有的Au-Al相都可能不受抑制地通过球形键生长。但是，键合金属化层的供应限制会引起反向转变，其中富铝相转变为富金相如果允许无限长的时间，Au_4Al会溶解;最终导致整个RZ-A中形成Au_4Al相。其程度取决于Al在Au中的溶解度。没有向键的侧面供应Au会引起Au_4Al相的逆相变，从而导致其余Au-Al相的横向生长。如果允许无限长的时间，横向相变将导致形成相，该相取决于空线下方非键合金属化（NBM）和Au_4Al中存在的Au和Al的相对比例。因此，在特定位置存在相球形键合的时间取决于热暴露的时间和温度。

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