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首页> 外文期刊>Journal of Micromechanics and Microengineering >Temperature and pressure dependence of resonance in multi-layer microcantilevers
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Temperature and pressure dependence of resonance in multi-layer microcantilevers

机译：多层微悬臂梁的共振温度和压力依赖性

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摘要

The resonance frequency of the fundamental and four higher order modes of a silicon dioxide microcantilever is measured. The effect on these modes of depositing a 400 nm gold coating is investigated theoretically and experimentally. We derive an analytical solution to the eigenmodes of a multi-layered cantilever and verify its validity by comparison to finite-element analysis as well as the experimentally obtained results. The temperature and pressure dependence of the resonance frequencies is investigated experimentally and found to be in good agreement with theoretical models. An experimentally obtained value for the temperature dependence of Young's modulus of elasticity for thermally grown SiO2 is presented.
机译：测量了二氧化硅微悬臂梁的基本模式和四个更高阶模式的共振频率。从理论上和实验上研究了对这些沉积400 nm金涂层的方式的影响。我们导出了多层悬臂本征模的解析解，并通过与有限元分析以及实验获得的结果进行比较来验证其有效性。实验研究了共振频率对温度和压力的依赖性，发现与理论模型吻合良好。给出了实验获得的热生长SiO2的杨氏弹性模量的温度依赖性值。

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