This paper reports on the design, simulation and opto-electro-mechanical characterization of a microelectromechanical system (MEMS) scanner actuated by an out-of-plane ( vertical) electrothermal actuator that was fabricated using a single layer silicon-on-insulator (SOI) foundry process. The overall size of the scanner, including the micromirror and the actuator, is 2 mm x 1 mm. A maximum static mechanical tilting angle of 5 degrees is achieved at a dc driving voltage of 18 V and current of 23 mA, corresponding to a 10 degrees optical scan angle. The scanner can be operated from dc to low frequencies ( the 3 dB bandwidth is from 0 Hz to 80 Hz), which meets the requirement for certain practical opto-electronic systems such as optical coherence tomography (OCT) systems. The scanner has a maximum mechanical tilting angle of 8 degrees at its resonant frequency of 2.19 kHz, corresponding to a total of 16 degrees maximum optical scan angle. Simulations of static and dynamic performances of the scanner have been conducted using finite element method (FEM) software, resulting in outcomes similar to the experimental findings. A thermal response time of 60 ms is calculated numerically using heat flow theory, while a thermal response time of 55.6 ms was experimentally obtained by analysing the intensity distribution of the scanned patterns generated when using a square driving waveform to drive the scanner.
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机译：本文报告了由平面外（垂直）电热驱动器驱动的微机电系统（MEMS）扫描器的设计，仿真和光电机械特性，该扫描器是使用单层绝缘体上硅（SOI）制造的）铸造工艺。扫描仪的整体尺寸（包括微镜和致动器）为2 mm x 1 mm。在18 V的直流驱动电压和23 mA的电流下可获得5度的最大静态机械倾斜角，对应于10度的光学扫描角。扫描仪可以在直流至低频（3 dB带宽从0 Hz到80 Hz）范围内操作，可以满足某些实用的光电系统（如光学相干断层扫描（OCT）系统）的要求。扫描仪在其共振频率为2.19 kHz时具有8度的最大机械倾斜角，对应于总共16度的最大光学扫描角。已经使用有限元方法（FEM）软件对扫描仪的静态和动态性能进行了仿真，得出的结果与实验结果相似。使用热流理论以数值方式计算了60 ms的热响应时间，而通过分析使用方形驱动波形驱动扫描仪时生成的扫描图案的强度分布，通过实验获得了55.6 ms的热响应时间。
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