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Self-assembled crystalline semiconductor optoelectronics on glass and plastic

机译:玻璃和塑料上的自组装晶体半导体光电

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摘要

In this paper, we demonstrate the integration of high-performance single crystalline inorganic μ-light emitting diodes (LEDs) onto unconventional substrates such as plastic and glass via self-assembly. AlGaAs-based free-standing red μ-LEDs were batch fabricated and released from their substrates for use in self-assembly. The templates for assembly were fabricated on substrates such as flexible plastics and glass. The self-assembly method is capable of positioning the micro-components onto the template in proper receptor sites with a high yield, and forming electrical connections between components and the template with 62% yield. The μ-LEDs remain functional even after significant bending and deformation of the plastic substrates. The self-assembly method offers a way to incorporate optoelectronics onto objects that are incompatible with conventional semiconductor manufacturing processes.
机译:在本文中,我们演示了通过自组装将高性能单晶无机μ发光二极管(LED)集成到非常规基材(例如塑料和玻璃)上的方法。批量制造基于AlGaAs的独立式红色μ-LED,并将其从其基板上释放出来以用于自组装。用于组装的模板被制造在诸如柔性塑料和玻璃的基底上。自组装方法能够以高收率将微组分定位在模板上合适的受体位点上,并能以62%的收率在组分与模板之间形成电连接。即使在塑料基板发生明显弯曲和变形后,μ-LED仍保持功能。自组装方法提供了一种将光电元件整合到与常规半导体制造工艺不兼容的物体上的方法。

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