...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of Micromechanics and Microengineering >Energy study of buckled micromachined beams for thin-film stress measurements applied to SiO sub(2)
【24h】

Energy study of buckled micromachined beams for thin-film stress measurements applied to SiO sub(2)

机译：屈曲微加工梁用于SiO sub（2）的薄膜应力测量的能量研究

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Measurements of maximal deflection amplitude were carried out on arrays of clamped-clamped SiO sub(2) microfabricated beams buckling under the effect of thin-film built-in compressive stress. The experimental deflection determination of these deflections yields the residual stress value in the SiO sub(2) film. This proposal is confirmed by appropriate theory that considers the issue of microfabricated beam buckling from an energy point of view. In this model, the total potential energy stored in a buckled microbeam is computed and the residual stress value is given by considering the measured buckling maximal deflection and by making approximations about the shape of the microbeam deflection curve. The SiO sub(2) film residual stress evaluated with the help of the energy method is in good agreement with values reported in the literature.
机译：在薄膜内置压应力的作用下，对夹钳式SiO sub（2）微加工梁屈曲的阵列进行了最大挠度振幅的测量。这些挠度的实验挠度确定会在SiO sub（2）膜中产生残余应力值。该建议已得到适当的理论的证实，该理论从能量的角度考虑了微型梁的屈曲问题。在该模型中，计算了弯曲的微束中存储的总势能，并通过考虑测得的屈曲最大挠度并通过近似微束挠度曲线的形状来给出残余应力值。借助能量方法评估的SiO sub（2）膜残余应力与文献报道的值非常吻合。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号