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首页> 外文期刊>Journal of Micromechanics and Microengineering >Design and fabrication of two-axis micromachined steel scanners
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Design and fabrication of two-axis micromachined steel scanners

机译：两轴微加工钢扫描仪的设计与制造

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摘要

This paper presents the fabrication and the test results of two-axis micromachined micro-mirror steel scanners developed for display and imaging applications. The novel fabrication method uses the conventional lithography and electrochemical metal etching techniques. A single photomask is used to define the whole structure, resulting in a simple and inexpensive fabrication process. Two different devices are designed, fabricated and characterized to test the proposed methods. Both of them employ the magnetostatic actuation to. generate excitation force/torque. First device (Type-A) is a gimballed cantilever one, and it is capable of an optical scanning angle of 11.7° and 23.2° in slow- and fast-scan directions, consuming a power of 42 mW and 30.6 mW, respectively. This structure has a quality factor of 287 in the slow-scan direction and a quality factor of 195 in the fast-scan one. The second device (Type-B) is a gimballed torsional one, and it has an optical scanning angle of 76° and 5.9° in slow- and fast-scan directions, consuming 37 mW and 39 mW, respectively. This structure has a quality factor of 132 in the slow-scan and 530 in the fast-scan directions, respectively. The maximum total optical scanning angles obtained for the slow- and fast-scan axes are 105° (gimballed torsional device, Type-B) and 42° (gimballed cantilever device, Type-A).
机译：本文介绍了为显示和成像应用开发的两轴微加工微镜钢扫描仪的制造和测试结果。该新颖的制造方法使用常规的光刻和电化学金属蚀刻技术。单个光掩模用于定义整个结构，从而实现了简单而廉价的制造过程。设计，制造和表征了两种不同的设备，以测试所提出的方法。他们两个都采用静磁致动。产生激励力/扭矩。第一个设备（A型）是一个万向悬臂设备，能够在慢速和快速扫描方向上具有11.7°和23.2°的光学扫描角，分别消耗42 mW和30.6 mW的功率。这种结构在慢扫描方向上的品质因数为287，在快扫描方向上的品质因数为195。第二个设备（B型）是一个万向扭转设备，它在慢速和快速扫描方向上的光学扫描角分别为76°和5.9°，分别消耗37 mW和39 mW。此结构在慢速扫描方向上的品质因数分别为132和530。对于慢速扫描轴和快速扫描轴，获得的最大总光学扫描角为105°（万向扭转装置，B型）和42°（万向悬臂装置，A型）。

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