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首页> 外文期刊>Journal of Micromechanics and Microengineering >Fabrication of a dual-planar-coil dynamic microphone by MEMS techniques
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Fabrication of a dual-planar-coil dynamic microphone by MEMS techniques

机译：利用MEMS技术制造双平面线圈动态麦克风

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摘要

A dual-planar-coil miniature dynamic microphone, one of the electro-acoustic transducers working with the principle of the electromagnetic induction, has been realized by semiconductor micro-processing and micro-electro-mechanical system (MEMS) techniques. This MEMS microphone mainly consists of a 1 μm thick diaphragm sandwiched by two spiral coils and vibrating in the region with the highest magnetic flux density generated by a double magnetic system. In comparison with the traditional dynamic microphone, besides the miniaturized dimension, the MEMS microphone also provides 325 times the vibration velocity of the diaphragm faster than the traditional microphone. Measured by an audio analyzer, the frequency response of the MEMS microphone is only 4.5 dBV Pa~(-1) lower than that of the traditional microphone in the range between 50 Hz and 20 kHz. The responsivity of -54.8 dB Pa~(-1) (at 1 kHz) of the MEMS device is competitive to that of a traditional commercial dynamic microphone which typically ranges from -50 to -60 dBV Pa~(-1) (at 1 kHz).
机译：通过半导体微处理和微机电系统（MEMS）技术已经实现了一种双平面线圈微型动态麦克风，它是一种基于电磁感应原理的电声换能器。该MEMS麦克风主要由1μm厚的振动膜组成，该振动膜夹在两个螺旋线圈之间，并在双磁系统产生的具有最高磁通密度的区域内振动。与传统的动圈麦克风相比，MEMSMEMS麦克风不仅具有微型化的尺寸，而且振膜的振动速度也比传统麦克风快325倍。通过音频分析仪测量，在50 Hz至20 kHz范围内，MEMS麦克风的频率响应仅比传统麦克风低4.5 dBV Pa〜（-1）。 MEMS器件的-54.8 dB Pa〜（-1）（在1 kHz时）的响应度与传统的商用动态麦克风的响应度相比，后者通常在-50至-60 dBV Pa〜（-1）（在1 kHz时）范围内千赫）。

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