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首页> 外文期刊>Journal of Micromechanics and Microengineering >MEMS sensor for in situ TEM-nanoindentation with simultaneous force and current measurements
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MEMS sensor for in situ TEM-nanoindentation with simultaneous force and current measurements

机译：MEMS传感器，用于原位TEM纳米压痕，同时进行力和电流测量

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摘要

A capacitive force sensor for in situ transmission electron microscope (TEM)-nanoindentation with simultaneous force and current measurement has been developed. The sensor was fabricated using bulk micro machining methods such as deep reactive ion etch, thermal oxidation, metal deposition and anodic bonding. Two different geometries of the sensor were designed to allow in situ TEM electromechanical experiments in the most common TEM instruments. Electrical probing is enabled by an on-chip insulator, electrically separating the indenter tip and the capacitor used for force measurements. The sensor was designed for the force range of 0 to 4.5 mN. Finally, we demonstrate for the first time in situ TEM-nanoindentation with simultaneous force and current measurements.
机译：已经开发出了一种用于原位透射电子显微镜（TEM）纳米压痕的电容式力传感器，同时测量了力和电流。该传感器是使用本体微加工方法制造的，例如深反应离子蚀刻，热氧化，金属沉积和阳极键合。设计了两种不同的传感器几何形状，以允许在最常见的TEM仪器中进行原位TEM机电实验。通过片上绝缘体实现电探测，该绝缘体将压头和用于力测量的电容器电隔离。传感器设计用于0至4.5 mN的力范围。最后，我们首次展示了同时进行力和电流测量的原位TEM纳米压痕。

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