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首页> 外文期刊>Journal of Micromechanics and Microengineering >Manipulation and in situ transmission electron microscope characterization of sub-100 nm nanostructures using a microfabricated nanogripper
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Manipulation and in situ transmission electron microscope characterization of sub-100 nm nanostructures using a microfabricated nanogripper

机译：使用微制造的纳米夹具对亚100 nm纳米结构进行操作和原位透射电子显微镜表征

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摘要

We present here a polysilicon electrothermal microfabricated nanogripper capable of manipulating nanowires and nanotubes in the sub-100 nm range. The nanogripper was fabricated with a mix and match microfabrication process, combining high throughput of photolithography with 10 nm resolution of electron beam lithography. Vertically grown III-V nanowires with a diameter of 70 nm were picked up using the nanogripper, allowing direct transfer of the nanogripper-nanowire ensemble into a transmission electron microscope (TEM) for structural characterization. By refining the end-effectors with focused ion beam milling and subsequently coating these with Au, the nanogripper could lift up laterally aligned single-walled carbon nanotubes from a 1μm wide trench, while immediately making good electrical contact. One such carbon nanotube was structurally and electrically characterized real-time in TEM, showing a breakdown current density of approximately 0.5 × 10~(12)Am~(-2). The nanogripper is the smallest microfabricated gripper to date and is the first tool showing repeatable, 3D nanomanipulation of sub-100 nm structures.
机译：我们在这里介绍了一种能够操纵小于100 nm范围内的纳米线和纳米管的多晶硅电热微加工纳米夹持器。纳米夹具是通过混合和匹配的微细加工工艺制造的，将高通量的光刻技术与10 nm分辨率的电子束光刻技术相结合。使用纳米夹具拾取直径为70 nm的垂直生长的III-V纳米线，从而将纳米夹具-纳米线集成体直接转移到透射电子显微镜（TEM）中进行结构表征。通过用聚焦离子束研磨细化末端执行器，然后用Au涂覆末端执行器，纳米夹持器可以从1μm宽的沟槽中提起横向排列的单壁碳纳米管，同时立即实现良好的电接触。一种这样的碳纳米管在TEM中具有实时的结构和电学特性，其击穿电流密度约为0.5×10〜（12）Am〜（-2）。纳米夹持器是迄今为止最小的微型夹持器，并且是第一个显示可重复进行的100 nm以下结构的3D纳米操纵的工具。

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