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首页> 外文期刊>Journal of Micromechanics and Microengineering >Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording
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Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording

机译：急性和亚慢性神经记录中使用的硅基微探针阵列的制造技术

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摘要

This work presents a new fabrication technology for silicon-based neural probe devices and their assembly into two-dimensional (2D) as well as three-dimensional (3D) microprobe arrays for neural recording. The fabrication is based on robust double-sided deep reactive ion etching of standard silicon wafers and allows full 3D control of the probe geometry. Wafer level electroplating of gold pads was performed to improve the 3D assembly into a platform. Lithography-based probe-tracking features for quality management were introduced. Probes for two different assembly methods, namely direct bonding to a flexible micro-cable and platform-based out-of-plane interconnection, were produced. Systems for acute and sub-chronic recordings were assembled and characterized. Recordings from rats demonstrated the recording capability of these devices.
机译：这项工作提出了一种新的制造技术，用于基于硅的神经探针设备，并将其组装成二维（2D）和三维（3D）微探针阵列以进行神经记录。该制造基于对标准硅片的坚固的双面深反应离子刻蚀，并允许对探针几何形状进行完全3D控制。进行了金垫的晶圆级电镀，以改善将3D组装到平台中的过程。引入了基于光刻的质量管理探针跟踪功能。生产了两种不同组装方法的探针，即直接键合到柔性微电缆和基于平台的平面外互连。急性和亚慢性记录系统进行了组装和表征。来自大鼠的录音证明了这些设备的录音能力。

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