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首页> 外文期刊>Journal of Micromechanics and Microengineering >A novel boundary-confined method for high numerical aperture microlens array fabrication
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A novel boundary-confined method for high numerical aperture microlens array fabrication

机译：高数值孔径微透镜阵列制造的一种新的边界限制方法

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摘要

In this paper, we present a technique to improve microlens array (MLA) uniformity after the thermal reflow process. It achieved high uniformity and high-numerical aperture (NA) simultaneously without sacrificing the fill factor. In order to improve the fill factor, a residual photoresist (PR) between the photoresist cylinders is used to make photoresist flow outward in standard thermal reflow processes. The PR cylinders, however, merge together easily due to an inexact reflow time and temperature distribution. This results in low uniformity and small lens height or low NA. We propose a boundary-confined method to pattern thin PR holes to prevent PR microlenses from merging together even after a long reflow time. Thick PR cylinders are patterned inside thin PR holes serving as boundaries. PR microlenses are formed after reflowing the thick photoresist cylinders. Both the uniformity and the height of a microlens can be well controlled. Besides, the fill factor is high due to the high resolution at the thin photoresist layer in photolithography. Our results show that the microlens is approximately a hemispherical profile. The gap between microlenses with a 48μm diameter in hexagonal arrangement is 2 μm and the height of the microlens is 22μm.
机译：在本文中，我们提出了一种在热回流工艺之后提高微透镜阵列（MLA）均匀性的技术。它在不牺牲填充系数的情况下同时实现了高均匀度和高数值孔径（NA）。为了提高填充系数，在标准热回流工艺中，光刻胶滚筒之间的残留光刻胶（PR）用于使光刻胶向外流动。但是，由于回流时间和温度分布不精确，PR钢瓶容易合并在一起。这导致较低的均匀性和较小的透镜高度或较低的NA。我们提出了一种边界受限的方法来对薄的PR孔进行构图，以防止PR微透镜即使经过很长的回流时间也可以合并在一起。厚的PR圆柱体在薄的PR孔中充当边界，并在其上进行构图。在回流厚的光刻胶滚筒后，形成PR微透镜。可以很好地控制微透镜的均匀性和高度。此外，由于光刻中薄的光致抗蚀剂层的高分辨率，填充因子高。我们的结果表明，微透镜约为半球形。以六边形排列的直径为48μm的微透镜之间的间隙为2μm，微透镜的高度为22μm。

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