In this study, we have demonstrated the fabrication of a microbeam array (MBA) with various thicknesses and investigated the suitability it for an acoustic sensor with wide-range frequency selectivity. For this, an MBA composed of 64 beams, with thicknesses varying from 2.99-142 μm, was fabricated by using single gray-scale lithography and a thick negative photoresist. The vibration of the beams in air was measured using a laser Doppler vibrometer; the resonant frequencies of the beams were measured to be from 11.5 to 290 kHz. Lastly, the frequency range of the MBA with non-uniform thickness was 10.9 times that of the MBA with uniform thickness.
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