Phase resolved measurement of anisotropic electron velocity distribution functions in a radio-frequency discharge

Crintea DL; Luggenholscher D; Kadetov VA; Isenberg C; Czarnetzki U

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Phase resolved measurement of anisotropic electron velocity distribution functions in a radio-frequency discharge

机译：射频放电中各向异性电子速度分布函数的相分辨测量

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Oscillating radio-frequency (RF) electric fields penetrating into a plasma lead to a corresponding oscillation of the electron velocity distribution function. Here we report on the first time measurement of this oscillation by Thomson scattering in a low-pressure inductively coupled plasma. The local current density is inferred by combining the oscillation amplitude with the plasma density, also resulting from Thomson scattering. The results are compared with a novel emission spectroscopic technique, RF modulation spectroscopy, which also provides direct determination of the electron oscillation velocity.

机译：渗透到等离子体中的振荡射频（RF）电场导致电子速度分布函数发生相应的振荡。在这里，我们报告了在低压感应耦合等离子体中通过汤姆森散射对该振动进行的首次测量。通过将振荡幅度与等离子密度相结合来推断局部电流密度，这也是由汤姆森散射引起的。将结果与新型发射光谱技术RF调制光谱进行比较，后者还可以直接确定电子振荡速度。

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《Journal of Physics, D. Applied Physics: A Europhysics Journal》 |2008年第8期|共6页
作者
Crintea DL; Luggenholscher D; Kadetov VA; Isenberg C; Czarnetzki U;
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正文语种 eng
中图分类应用物理学;
关键词
LASER THOMSON SCATTERING; NEUTRAL LOOP DISCHARGE; PLASMA PARAMETERS; RF DISCHARGE; TEMPERATURE; HELIUM;

机译：激光汤姆森散射;中性线放电;等离子参数;射频放电;温度;氦气;

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1. Phase resolved measurement of anisotropic electron velocity distribution functions in a radio-frequency discharge [J] . Crintea DL, Luggenholscher D, Kadetov VA, Journal of Physics, D. Applied Physics: A Europhysics Journal . 2008,第8期

机译：射频放电中各向异性电子速度分布函数的相分辨测量
2. Temporally resolved ion velocity distribution measurements in a radio-frequency plasma sheath [J] . Jacobs B., Gekelman W., Pribyl P., Physics of plasmas . 2011,第5aPta1期

机译：射频等离子体鞘中的临时分辨离子速度分布测量
3. Phase-Resolved Measurements of Ion Velocity in a Radio-Frequency Sheath [J] . Brett Jacobs, Walter Gekelman, Pat Pribyl, Physical review letters . 2010,第7期

机译：射频鞘层中离子速度的相位分辨测量
4. Space and phase resolved electron energy distribution functions in anindustrial dual-frequency capacitively coupled radio-frequency discharge [C] . J. Schulze, T. Gans, D. O'Connell, International conference on phenomena in ionized gases;ICPIG 2007 . 2007

机译：在工业双频电容耦合射频放电中空间和相位分辨的电子能量分布函数
5. Measurements of metastable atom density using energies and densities of energetic “fast” electrons detected in the electron energy distribution function associated with the afterglow plasma produced by a radio frequency inductively coupled plasma helium discharge [D] . Blessington, Jon C. 2007

机译：使用能量和高能“快速”电子的密度测量亚稳态原子密度，电子能量分布函数中检测到与射频感应耦合等离子体氦放电产生的余辉等离子体相关的电子能量分布函数
6. Time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputtering [O] . Martin Roelsgaard, Ann-Christin Dippel, Kasper Andersen Borup, 2019

机译：射频磁控溅射沉积过程中时间分辨掠入射对分布函数
7. Measurement of Anisotropic Electron Velocity Distribution Function in LHD by Polarization Spectroscopy [O] . Motoshi GOTO, Nilam RAMAIYA, Tetsutarou OISHI, 2021

机译：偏振光谱法测量LHD中各向异性电子速度分布功能

Phase resolved measurement of anisotropic electron velocity distribution functions in a radio-frequency discharge

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