Reconstruction of the precision surface shape of substrates for Reflective X-Ray optical components on the basis of Single-Axis profilometer measurements

Savelev I.S.

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Reconstruction of the precision surface shape of substrates for Reflective X-Ray optical components on the basis of Single-Axis profilometer measurements

机译：基于单轴轮廓仪测量，用于反射X射线光学组件的基板的精确表面形状的重建

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摘要

The features of quality control of surfaces of precision optical components are considered. A method of surface reconstruction based on long-trace profilometer measurements is developed.

机译：考虑了精密光学元件表面质量控制的特点。开发了一种基于长曲线轮廓仪测量的表面重建方法。

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《Journal of surface investigation: x-ray, synchrotron and neutron techniques》 |2011年第3期|共6页
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Savelev I.S.;
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正文语种 eng
中图分类原子核物理学、高能物理学;
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1. Reconstruction of the precision surface shape of substrates for Reflective X-Ray optical components on the basis of Single-Axis profilometer measurements [J] . Savelev I.S. Journal of surface investigation: x-ray, synchrotron and neutron techniques . 2011,第3期

机译：基于单轴轮廓仪测量，用于反射X射线光学组件的基板的精确表面形状的重建
2. A high-precision technique using X-ray reflectivity for the measurement of surface and interface roughness [J] . Bahr D., Dev B. N., Ghose S. K., Current science . 1995,第06期

机译：使用X射线反射率测量表面和界面粗糙度的高精度技术
3. Optimizing lateral homogeneity of ion-induced surface modifications of non-planar dielectric polyethylene components employing ion fluence simulations and optical measurements of the sp2-dependent reflectivity [J] . Taiber Jochen, Buchegger Sascha, Stritzker Bernd, Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms . 2018,第OCTa15期

机译：使用离子注量模拟和依赖于sp2的反射率的光学测量来优化非平面介电聚乙烯组件的离子诱导表面修饰的横向均匀性
4. Fabrication thermal stability and reflectivity measurements of Mo/Si multilayers as x-ray mirrors and other optical components [C] . Andreas Kloidt, H.J. Stock, Ulf Kleineberg, Conference on multilayer and grazing incidence x-ray/EUV optics for astronomy and projection lithography . 1993

机译：制造热稳定性和Mo / Si多层作为X射线镜和其他光学组件的热稳定性和反射率测量
5. Analysis and design of precision optical components in high-intensity, third-generation x-ray beamlines. [D] . Tajiri, Gordon Chikao. 2001

机译：高强度第三代X射线束线中的精密光学组件的分析和设计。
6. Reliability of trunk shape measurements based on 3-D surface reconstructions [O] . Valérie Pazos, Farida Cheriet, Jean Danserau, 2007

机译：基于3-D表面重建的躯干形状测量的可靠性
7. Optical 3D profilometer for in-process measurement of microsurface based on phase retrieval technique [O] . Atsushi Taguchi, Takashi Miyoshi, Yasuhiro Takaya, 2003

机译：用于基于相位检索技术的微表面在线测量的光学三维表面光度仪
8. Reflectivity profilometer for the optical characterisation of grade reflectivity mirrors in the 250 nm - 1100 nm spectral region [R] . Colucci, A. , Nichelatti, E. 1998

机译：反射率轮廓仪，用于250 nm - 1100 nm光谱区域中等级反射率镜的光学表征

Reconstruction of the precision surface shape of substrates for Reflective X-Ray optical components on the basis of Single-Axis profilometer measurements

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