Design of the aspheric Schwarzschild lens for a nanolithographer with the operating wavelength λ = 13.5 nm

Salashchenko N.N.; Skryl A.S.; Toropko M.N.; Chkhalo N.I.

首页> 外文期刊>Journal of surface investigation: x-ray, synchrotron and neutron techniques >Design of the aspheric Schwarzschild lens for a nanolithographer with the operating wavelength λ = 13.5 nm

【24h】

Design of the aspheric Schwarzschild lens for a nanolithographer with the operating wavelength λ = 13.5 nm

机译：用于纳米光刻机的非球面Schwarzschild透镜的设计，其工作波长λ= 13.5 nm

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

The design of an aspheric Schwarzschild lens applicable to a nanolithographic test bench with an operating wavelength of 13.5 nm is discussed. Lenses with numerical apertures of 0.3 and 0.4 are examined. The influence of lens aberrations and deviations of optical scheme parameters from rated values on the image quality is analyzed.

机译：讨论了适用于工作波长为13.5 nm的纳米光刻试验台的非球面Schwarzschild透镜的设计。检查数值孔径为0.3和0.4的镜头。分析了透镜像差和光学方案参数与额定值的偏差对图像质量的影响。

著录项

来源
《Journal of surface investigation: x-ray, synchrotron and neutron techniques》 |2011年第3期|共5页
作者
Salashchenko N.N.; Skryl A.S.; Toropko M.N.; Chkhalo N.I.;
展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类原子核物理学、高能物理学;
关键词

相似文献

外文文献
中文文献
专利

1. Design of the aspheric Schwarzschild lens for a nanolithographer with the operating wavelength λ = 13.5 nm [J] . Salashchenko N.N., Skryl A.S., Toropko M.N., Journal of surface investigation: x-ray, synchrotron and neutron techniques . 2011,第3期

机译：用于纳米光刻机的非球面Schwarzschild透镜的设计，其工作波长λ= 13.5 nm
2. Reflective mask for projection lithography operating at a wavelength of 13.5 nm [J] . Gusev S.A., Zuev S.Y., Klimov A.Y., Journal of surface investigation: x-ray, synchrotron and neutron techniques . 2012,第4期

机译：用于投射光刻的反射掩模，其波长为13.5 nm
3. Genetic algorithm designed silicon integrated photonic lens operating at 1550 nm [J] . Marques-Hueso Jose, Sanchis Lorenzo, Cluzel Benoit, Applied Physics Letters . 2010,第7期

机译：遗传算法设计的硅集成光子透镜，工作于1550 nm
4. Investigation of fluorescence on wavelength 13.5 nm of x-ray tube for nanolithographer [C] . N. Chkhalo, I. Zabrodin, I. Kaskov, SPIE Conference on Micro- and Nanoelectronics . 2008

机译：用于纳米螺旋管X射线管波长13.5nm荧光的研究
5. A MEASUREMENT AND ANALYSIS OF THE BRIGHTNESS TEMPERATURE DISTRIBUTION OVER THE PLANET VENUS AT WAVELENGTHS OF 13.5 AND 19 MILLIMETERS UTILIZINGTHE MARINER R II SPACECRAFT [D] . JONES, DOUGLAS EMRON. -1

机译：利用MARINER R II航天器在13.5和19毫米波长处行星金星上亮度分布的测量和分析。
6. Misalignment and tilt effect on aspheric intraocular lens designs after a corneal refractive surgery [O] . Jesús Pérez-Gracia, Francisco J. Ávila, Jorge Ares, 2020

机译：角膜屈光手术后非球面眼晶晶状体设计的错位和倾斜效应
7. Aspherical Lens Design Using Genetic Algorithm for Reducing Aberrations in Multifocal Artificial Intraocular Lens [O] . Chih-Ta Yen, Shih-Cyuan Jin 2015

机译：基于遗传算法的非球面透镜设计减少多焦点人工晶状体的像差
8. Imaging Using a Multifocal Aspheric Lens to Obtain Extended Depth of Field. [R] . George, N., Chi, W. 2005

机译：使用多焦点非球面透镜进行成像以获得扩展的景深。

Design of the aspheric Schwarzschild lens for a nanolithographer with the operating wavelength λ = 13.5 nm

摘要

著录项

相似文献

相关主题

期刊订阅