Study of the influence of the substrate temperature and the deposition rate and time on surface morphology

Vasilev V.A.; Chernov P.S.

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Study of the influence of the substrate temperature and the deposition rate and time on surface morphology

机译：研究衬底温度，沉积速率和时间对表面形态的影响

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An original model of the growth of thin-film surfaces is proposed. It is a stochastic cellular automaton taking particle diffusion into account. It makes it possible to study the influence of the substrate temperature and the deposition rate and time on the parameters characterizing the surface morphology. The results of the comparison of experimental data obtained using atomic-force microscopy and our theoretical data obtained by means of simulation using the proposed diffusion model are presented.

机译：提出了薄膜表面生长的原始模型。它是一个随机的细胞自动机，考虑了粒子扩散。可以研究衬底温度，沉积速率和时间对表征表面形态的参数的影响。给出了使用原子力显微镜获得的实验数据与通过使用所提出的扩散模型进行模拟获得的理论数据进行比较的结果。

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《Journal of surface investigation: x-ray, synchrotron and neutron techniques》 |2013年第3期|共7页
作者
Vasilev V.A.; Chernov P.S.;
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原文格式 PDF
正文语种 eng
中图分类 53.8;
关键词
Study; influence; substrate;

机译：研究;影响;底物;

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Study of the influence of the substrate temperature and the deposition rate and time on surface morphology

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