...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of the Korean Physical Society >Deposition and Characterization of Porous Low-Dielectric-ConstantSiOC(-H) Thin Films Deposited from TES/O_2 precursors by UsingPlasma-Enhanced Chemical Vapor Deposition
【24h】

Deposition and Characterization of Porous Low-Dielectric-ConstantSiOC(-H) Thin Films Deposited from TES/O_2 precursors by UsingPlasma-Enhanced Chemical Vapor Deposition

机译：等离子体增强化学气相沉积法沉积并表征TES / O_2前驱体形成的多孔低介电常数SiOC（-H）薄膜

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Low-dielectric-constant SiOC(-H) thin films were deposited on p-type Si(100) substrates by usingplasma enhanced chemical vapor deposition (PECVD) from triethoxysilane (TES; C_6H_(16)O_3Si) andoxygen gas as precursors. A detailed characterization, such as the chemical structure, bondingconfigurations and dielectric constant (k), of the SiOC(-H) films was performed. A possible mech-anism responsible for the reduction in the dielectric constant of the SiOC(-H) is described. In theSiOC(-H) film, the CH_3group as an end group is introduced into the -O- Si-network, therebyreducing the density to decrease the dielectric constant. X-ray photoelectron spectroscopic (XPS)studies were carried out to study the binding energies of Si-C, O-Si-O, C-C(H), C=C, C-O andC=O bonds in the SiOC(-H) films as functions of the flow rate ratio. The dielectric constant of theSiOC(-H) film was evaluated by using the C-V measurements for a metal-insulator-semiconductor(MIS), Al/SiOC(-H)/p-Si(100), structure.
机译：通过使用三乙氧基硅烷（TES; C_6H_（16）O_3Si）和氧气为前驱体的等离子体增强化学气相沉积（PECVD），在p型Si（100）衬底上沉积低介电常数的SiOC（-H）薄膜。对SiOC（-H）薄膜进行了详细的表征，如化学结构，键合构型和介电常数（k）。描述了可能导致SiOC（-H）介电常数降低的机理。在SiOC（-H）膜中，将作为端基的CH_3基团引入-O-Si-网络中，从而降低密度以降低介电常数。通过X射线光电子能谱（XPS）研究了SiOC（-H）薄膜中Si-C，O-Si-O，CC（H），C = C，CO和C = O键的结合能作为流量比的函数。 SiOC（-H）膜的介电常数通过使用C / V测量来评估金属绝缘体半导体（MIS），Al / SiOC（-H）/ p-Si（100）结构的介电常数。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号