Diffusion of cations (self-, impurities) in single-crystal MgO have been studied. The diffusion penetration profileswere obtained with the aid of a secondary ion mass spectrometry(SIMS). The diffusion profiles contained lattice and dislocationdiffusion contributions. The temperature dependence of lattice anddislocation diffusion for 16 species has been determined. Thedislocation diffusion coefficients were 4 to 6 orders of magnitudelarger than those of lattice diffusion, although the activationenergies for lattice and dislocation diffusion on the same elementwere not so different. A linear correlation between pre-exponentialfactor and activation energy for lattice and dislocation diffusionhas been confirmed. The elements were separated into two trendsof lines by the geometrical condition. The slope of these lines onlattice and dislocation diffusion corresponds with that expectedfrom Zener's elastic theory.
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