Optical nonreciprocal devices with a silicon guiding layer fabricated by wafer bonding are proposed. The optical nonreciprocal devices are composed of a magneto-optic waveguide with a magnetic garnet/Si/SiO_(2) structure. Nonreciprocal characteristics are obtained by an evanescent field penetrating into the upper magnetic garnet cladding layer. Several kinds of the optical nonreciprocal device are investigated with the magneto-optic waveguide and designed at a wavelength of 1.55 μm. As a preliminary experiment, wafer bonding between Gd_(3)Ga_(5)O_(12) and Si was studied. Wafer bonding was successfully achieved with heat treatment at 220℃ in H_(2) ambient.
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机译：提出了具有通过晶片键合制造的硅引导层的光学不可逆器件。光学不可逆器件由具有磁性石榴石/ Si / SiO_（2）结构的磁光波导组成。互消特性是通过渐逝场穿透到上部石榴石磁性覆盖层中获得的。用磁光波导研究了几种光学不可逆器件，并设计了1.55μm的波长。作为初步实验，研究了Gd_（3）Ga_（5）O_（12）和Si之间的晶片键合。在H_（2）环境中，在220℃下进行热处理，成功实现了晶圆键合。
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