In this paper, an optical accelerometer based on grating interferometer with phase modulation technique is proposed. This device architecture consists of a laser diode, a sensing chip and an optoelectronic processing circuit. The sensing chip is a sandwich structure, which is composed of a grating, a piezoelectric translator and a micromachined silicon structure consisting of a proof mass and four cantilevers. The detected signal is intensity-modulated with phase modulation technique and processed with a lock-in amplifier for demodulation. Experimental results show that this optical accelerometer has acceleration sensitivity of 619 V/g and high-resolution acceleration detection of 3 μg in the linear region.
展开▼
机译：提出了一种基于光栅干涉仪的相位调制技术的光学加速度计。该器件架构包括一个激光二极管，一个传感芯片和一个光电处理电路。传感芯片是一个三明治结构，由光栅，压电转换器和由检测质量和四个悬臂组成的微加工硅结构组成。使用相位调制技术对检测到的信号进行强度调制，并使用锁相放大器进行处理以进行解调。实验结果表明，该光学加速度计的加速度灵敏度为619 V / g，在线性区域的高分辨率加速度检测值为3μg。
展开▼
