Deposition of platinum on oxygen plasma treated carbon nanotubes by atomic layer deposition

Hsueh Y.-C.; Wang C.-C.; Liu C.; Kei C.-C.; Perng T.-P.

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Deposition of platinum on oxygen plasma treated carbon nanotubes by atomic layer deposition

机译：通过原子层沉积在氧等离子体处理的碳纳米管上沉积铂

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Platinum nanoparticles were deposited on oxygen plasma treated carbon nanotubes (CNTs) by atomic layer deposition (ALD). The treatment time with oxygen plasma generated by microwaves under a power of 600 W varied from 5 to 20 s. The number of ALD cycles was controlled at 5-125. X-ray photoelectron spectroscopic analysis indicated that oxygen plasma can graft oxygen-containing functional groups to the CNT _surface to act as nucleation sites for growth of Pt nanoparticles. Formation of very uniform and well distributed Pt nanoparticles of a size of 1.60-4.80 nm was achieved. The growth rate of Pt nanoparticles could be controlled by the number of ALD cycles and oxygen plasma treatment time. This offers a dry process to deposit well-dispersed metallic nanoparticles on selected support materials.

机译：铂纳米颗粒通过原子层沉积（ALD）沉积在氧等离子体处理的碳纳米管（CNT）上。微波在600 W的功率下产生的氧等离子体的处理时间为5到20 s。 ALD循环数控制在5-125。 X射线光电子能谱分析表明，氧等离子体可以将含氧的官能团接枝到CNT表面，作为Pt纳米颗粒生长的成核位点。实现了尺寸为1.60-4.80 nm的非常均匀且分布均匀的Pt纳米颗粒的形成。 Pt纳米粒子的生长速率可以通过ALD循环次数和氧等离子体处理时间来控制。这提供了一种干法，以将分散良好的金属纳米颗粒沉积在选定的载体材料上。

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《Nanotechnology》 |2012年第40期|共6页
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Hsueh Y.-C.; Wang C.-C.; Liu C.; Kei C.-C.; Perng T.-P.;
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1. Deposition of platinum on oxygen plasma treated carbon nanotubes by atomic layer deposition [J] . Hsueh Y.-C., Wang C.-C., Liu C., Nanotechnology . 2012,第40期

机译：通过原子层沉积在氧等离子体处理的碳纳米管上沉积铂
2. A CoOx/FeO(x)heterojunction on carbon nanotubes prepared by plasma-enhanced atomic layer deposition for the highly efficient electrocatalysis of oxygen evolution reactions [J] . Yang XinXin, Sun Xiang, Gan Li-Yong, Journal of Materials Chemistry, A. Materials for energy and sustainability . 2020,第30期

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3. Nitrogen-doped CoOx/carbon nanotubes derived by plasma-enhanced atomic layer deposition: Efficient bifunctional electrocatalyst for oxygen reduction and evolution reactions [J] . Sun Xiang, Yang Xinxin, Xiang Hong, Electrochimica Acta . 2019,第期

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4. Deposition of Pt Nanoparticles on Oxygen Plasma Treated Carbon Nanotubes by Atomic Layer Deposition [C] . Yang-Chih Hsueh, Chia-Te Hu, Chih-Chieh Wang, Proton Exchange Membrane Fuel Cells 8 . 2008

机译：原子层沉积在氧等离子体处理的碳纳米管上沉积Pt纳米颗粒
5. Nanoscale investigation of platinum nanoparticles on strontium titanium oxide grown via physical vapor deposition and atomic layer deposition. [D] . Christensen, Steven Thomas. 2008

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6. Atomic Layer Deposition of Buffer Layers for the Growth of Vertically Aligned Carbon Nanotube Arrays [O] . Hao-Hao Li, Guang-Jie Yuan, Bo Shan, 2019

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7. Plasma deposition—Impact of ions in plasma enhanced chemical vapor deposition, plasma enhanced atomic layer deposition, and applications to area selective deposition [O] . Christophe Vallée, Marceline Bonvalot, Samia Belahcen, 2020

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8. Multilayer and Functional Coatings on Carbon Nanotubes using Atomic Layer Deposition [R] . Herrman, C. F., Fabreguette, F. H., Finch, D. S., 2005

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Deposition of platinum on oxygen plasma treated carbon nanotubes by atomic layer deposition

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