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Photopatternable transparent conducting oxide nanoparticles for transparent electrodes

机译:用于透明电极的可光图案化的透明导电氧化物纳米粒子

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摘要

We report a method to fabricate tailored transparent electrodes using photopatternable transparent conducting oxide nanoparticles (TCO NPs). We demonstrate solution-processed micropatterns by a conventional photolithography technique. We have synthesized indium tin oxide (ITO) NPs and functionalized them with a photolabile group, such as t-butoxycarbonyl (t-BOC), which can be deprotected by a chemical amplification reaction in the solid state film. The chemical amplification reaction leads to a shortening of the ligand that changes the solubility of the resulting ITO films. This ligand shortening process also contributes to a reduction of the sheet resistance in the resulting photopatterned ITO films. Furthermore, we have demonstrated the general viability and strength of this approach by also photopatterning zinc oxide (ZnO) NPs.
机译:我们报告了一种使用可光图案化的透明导电氧化物纳米粒子(TCO NPs)制作定制透明电极的方法。我们通过常规的光刻技术演示了溶液处理的微图案。我们已经合成了铟锡氧化物(ITO)NP,并用不耐光的基团(例如叔丁氧羰基(t-BOC))对其进行功能化,该基团可以通过固态膜中的化学扩增反应进行脱保护。化学扩增反应导致配体的缩短,从而改变了所得ITO膜的溶解度。这种配体缩短过程还有助于降低所得的光图案化ITO膜的薄层电阻。此外,我们还通过对氧化锌(ZnO)NP进行了光构图,证明了该方法的一般可行性和强度。

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