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One-step sol-gel imprint lithography for guided-mode resonance structures

机译：导模共振结构的一步式溶胶-凝胶压印光刻

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摘要

Guided-mode resonance (GMR) structures consisting of sub-wavelength periodic gratings are capable of producing narrow-linewidth optical resonances. This paper describes a sol-gel-based imprint lithography method for the fabrication of submicron 1D and 2D GMR structures. This method utilizes a patterned polydimethylsiloxane (PDMS) mold to fabricate the grating coupler and waveguide for a GMR device using a sol-gel thin film in a single step. An organic-inorganic hybrid sol-gel film was selected as the imprint material because of its relatively high refractive index. The optical responses of several sol-gel GMR devices were characterized, and the experimental results were in good agreement with the results of electromagnetic simulations. The influence of processing parameters was investigated in order to determine how finely the spectral response and resonant wavelength of the GMR devices could be tuned. As an example potential application, refractometric sensing experiments were performed using a 1D sol-gel device. The results demonstrated a refractive index sensitivity of 50 nm/refractive index unit. This one-step fabrication process offers a simple, rapid, and low-cost means of fabricating GMR structures. We anticipate that this method can be valuable in the development of various GMR-based devices as it can readily enable the fabrication of complex shapes and allow the doping of optically active materials into sol-gel thin film.
机译：由亚波长周期性光栅组成的导模谐振（GMR）结构能够产生窄线宽的光学谐振。本文介绍了一种基于溶胶-凝胶的压印光刻技术，用于制造亚微米1D和2D GMR结构。该方法利用图案化的聚二甲基硅氧烷（PDMS）模具在单个步骤中制造出使用溶胶凝胶薄膜的GMR器件的光栅耦合器和波导。选择有机-无机杂化溶胶-凝胶膜作为压印材料，因为其相对较高的折射率。表征了几种溶胶凝胶GMR器件的光学响应，实验结果与电磁仿真结果吻合良好。为了确定可以微调GMR装置的光谱响应和谐振波长，研究了加工参数的影响。作为潜在的示例应用，使用1D溶胶-凝胶设备进行了折光率传感实验。结果表明折射率灵敏度为50nm /折射率单位。这一一步的制造过程提供了一种简单，快速且低成本的制造GMR结构的方法。我们预期该方法在各种基于GMR的设备的开发中将是有价值的，因为它可以轻松地制造复杂形状并允许将光学活性材料掺杂到溶胶-凝胶薄膜中。

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