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Quantification of surface displacements and electromechanical phenomena via dynamic atomic force microscopy

机译：通过动态原子力显微镜对表面位移和机电现象进行量化

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摘要

Detection of dynamic surface displacements associated with local changes in material strain provides access to a number of phenomena and material properties. Contact resonance-enhanced methods of atomic force microscopy (AFM) have been shown capable of detecting similar to 1-3 pm-level surface displacements, an approach used in techniques such as piezoresponse force microscopy, atomic force acoustic microscopy, and ultrasonic force microscopy. Here, based on an analytical model of AFM cantilever vibrations, we demonstrate a guideline to quantify surface displacements with high accuracy by taking into account the cantilever shape at the first resonant contact mode, depending on the tip-sample contact stiffness. The approach has been experimentally verified and further developed for piezoresponse force microscopy (PFM) using well-defined ferroelectric materials. These results open up a way to accurate and precise measurements of surface displacement as well as piezoelectric constants at the pm-scale with nanometer spatial resolution and will allow avoiding erroneous data interpretations and measurement artifacts. This analysis is directly applicable to all cantilever-resonance-based scanning probe microscopy (SPM) techniques.
机译：与材料应变的局部变化相关的动态表面位移的检测提供了访问多种现象和材料特性的途径。已经显示出原子力显微镜（AFM）的接触共振增强方法能够检测类似于1-3 pm级的表面位移，这种方法在诸如压电响应力显微镜，原子力声学显微镜和超声力显微镜等技术中使用。在这里，基于AFM悬臂振动的分析模型，我们展示了一个指南，该指南将考虑到尖端样品的接触刚度，通过考虑在第一共振接触模式下的悬臂形状来高精度地量化表面位移。该方法已通过实验验证，并已使用定义明确的铁电材料进一步开发用于压电响应力显微镜（PFM）。这些结果为以纳米空间分辨率在pm尺度上精确，精确地测量表面位移以及压电常数提供了一种途径，并且将避免错误的数据解释和测量伪像。该分析直接适用于所有基于悬臂共振的扫描探针显微镜（SPM）技术。

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