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首页> 外文期刊>Physica, B. Condensed Matter >The enhanced conductivity and stability of AZO thin films with a TiO_2 buffer layer
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The enhanced conductivity and stability of AZO thin films with a TiO_2 buffer layer

机译：带有TiO_2缓冲层的AZO薄膜增强的电导率和稳定性

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摘要

Aluminum doped zinc oxide (AZO) films were substitutes of the SnO_2:F films on soda lime glass substrate in the amorphous thin-film solar cells due to good properties and low cost. In order to improve properties of AZO films, the TiO_2 buffer layer had been introduced. AZO films with and without TiO_2 buffer layer were deposited on soda lime glass substrates by r.f. magnetron sputtering. Subsequently, one group samples were annealed in vacuum (0.1 Pa) at 500 °C for 120 s using the RTA system, and the influence of TiO 2 thickness on the properties of AZO films had been discussed. The XRD measurement results showed that all the films had a preferentially oriented (0 0 2) peak, and the intensity of (0 0 2) peak had been enhanced for the AZO films with TiO_2 buffer layer. The resistivity of TiO_2 (3.0 nm)/AZO double-layer film is 4.76×10~(-4) Ω cm with the maximum figure merit of 1.92×10 ~(-2) Ω~(-1), and the resistivity has a remarkable 28.7 decrease comparing with that of the single AZO film. The carrier scattering mechanism of TiO_2 (3.0 nm)/AZO double-layer film had been described by Hall measurement in different temperatures. The average transmittance of all the films exceeded 92 in the visible spectrum. Another group samples were heat treated in the quartz tube in air atmosphere, and the effect of TiO_2 thickness on thermal stability of AZO films had been discussed.
机译：铝掺杂的氧化锌（AZO）薄膜具有良好的性能和低成本，可替代非晶薄膜太阳能电池中钠钙玻璃基板上的SnO_2：F薄膜。为了改善AZO薄膜的性能，引入了TiO_2缓冲层。用r.f法将具有和不具有TiO 2缓冲层的AZO膜沉积在钠钙玻璃基板上。磁控溅射。随后，使用RTA系统在500°C的真空（0.1 Pa）中将一组样品退火120 s，并讨论了TiO 2厚度对AZO膜性能的影响。 XRD测量结果表明，所有薄膜均具有优先取向的（0 0 2）峰，具有TiO_2缓冲层的AZO薄膜的（0 0 2）峰强度得到增强。 TiO_2（3.0 nm）/ AZO双层薄膜的电阻率为4.76×10〜（-4）Ωcm，最大图形性能为1.92×10〜（-2）Ω〜（-1）。与单个AZO膜相比，下降了28.7％。通过霍尔测量在不同温度下描述了TiO_2（3.0nm）/ AZO双层薄膜的载流子散射机理。所有薄膜的平均透射率在可见光谱中均超过92。另一组样品在大气中在石英管中热处理，讨论了TiO_2厚度对AZO膜热稳定性的影响。

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