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In situ patterning of filamentary YBCO coated conductors

机译:丝状YBCO涂层导体的原位图案

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摘要

Promising technique for in situ patterning of filamentary YBCO coated conductors with smooth surface without grooves has been developed. Selective epitaxial growth of the YBCO film forming continual filamentary structure with sharp, well defined interface between superconductive and resistive parts of the coating was processed on modified ISD-MgO buffered metallic substrate. Prior to the YBCO deposition, thin titanium metallic film patterned to strips by lift-off technique was deposited on the MgO buffer layer. For the filamentary YBCO film deposition a standard processing equipments exploiting standard physical deposition methods can be used, Without any additional treatment of the YBCO coating after deposition. (C) 2008 Elsevier B.V. All rights reserved.
机译:已经开发了有希望的技术,用于原位构图具有光滑表面且没有凹槽的丝状YBCO涂层导体。在改性的ISD-MgO缓冲金属基材上加工YBCO膜的选择性外延生长,形成连续的丝状结构,在涂层的超导和电阻部分之间形成清晰,清晰的界面。在YBCO沉积之前,将通过剥离技术将图形图案化为条状的钛金属薄膜沉积在MgO缓冲层上。对于丝状YBCO膜沉积,可以使用利用标准物理沉积方法的标准加工设备,而无需在沉积后对YBCO涂层进行任何额外处理。 (C)2008 Elsevier B.V.保留所有权利。

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