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首页> 外文期刊>The journal of physical chemistry, C. Nanomaterials and interfaces >Carbon Structures Grown by Direct Current Microplasma: Diamonds, Single-Wall Nanotubes, and Graphene
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Carbon Structures Grown by Direct Current Microplasma: Diamonds, Single-Wall Nanotubes, and Graphene

机译：直流微等离子体生长的碳结构：金刚石，单壁纳米管和石墨烯

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摘要

Plasma assisted CVD is now an established technique for the growth of a variety of dielectrics and semiconductors. The versatility of an in-house developed direct-current (dc) microplasma deposition system is demonstrated here for the growth of a wide range of carbon-based materials. Diamond, nanodiamond, nanocrystalline graphite, single-wall carbon nanotubes, and few-layer graphene have been deposited using the same dc microplasma deposition system using 0.5% CH4/H2 gas feed, but changing only the substrate temperature (in the range 500—1150 °C) and the total pressure (0.3—200 Torr). The different structures have been characterized by scanning electron microscopy and micro-Raman spectroscopy. The experimental data have been interpreted from a thermodynamic point of view by applying a nonequilibrium nondissipative model. Nonequilibrium phase diagrams are presented and compared to the experimental data to provide a wide-ranging interpretation scenario.
机译：如今，等离子辅助CVD是用于各种电介质和半导体生长的一项成熟技术。此处展示了内部开发的直流（dc）微等离子体沉积系统的多功能性，可用于多种碳基材料的生长。金刚石，纳米金刚石，纳米晶体石墨，单壁碳纳米管和几层石墨烯已使用0.5％CH4 / H2供气的同一直流微等离子体沉积系统沉积，但仅改变了基板温度（在500-1150范围内） °C）和总压力（0.3-200 Torr）。通过扫描电子显微镜和显微拉曼光谱表征了不同的结构。通过应用非平衡非耗散模型从热力学角度解释了实验数据。提出了非平衡相图并将其与实验数据进行比较以提供广泛的解释方案。

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