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首页> 外文期刊>Journal of Applied Polymer Science >Inkjet printing of polyimide insulators for the 3D printing of dielectric materials for microelectronic applications
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Inkjet printing of polyimide insulators for the 3D printing of dielectric materials for microelectronic applications

机译：聚酰亚胺绝缘体的喷墨印刷，用于微电子应用的介电材料的3D打印

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In this article, we report the first continuous fabrication of inkjet-printed polyimide films, which were used as insulating layers for the production of capacitors. The polyimide ink was prepared from its precursor poly(amic) acid, and directly printed on to a hot substrate (at around 160 degrees C) to initialize a rapid thermal imidization. By carefully adjusting the substrate temperature, droplet spacing, droplet velocity, and other printing parameters, polyimide films with good surface morphologies were printed between two conducting layers to fabricate capacitors. In this work, the highest capacitance value, 2.82 +/- 0.64 nF, was achieved by capacitors (10 mm x 10 mm) with polyimide insulating layers thinner than 1 m, suggesting that the polyimide inkjet printing approach is an efficient way for producing dielectric components of microelectronic devices. (c) 2016 The Authors Journal of Applied Polymer Science Published by Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2016, 133, 43361.
机译：在本文中，我们报告了喷墨印刷聚酰亚胺薄膜的首次连续制造，该薄膜被用作生产电容器的绝缘层。聚酰亚胺油墨是由其前体聚（酰胺）酸制备的，并直接印刷到热的基材上（约160摄氏度）以初始化快速的热酰亚胺化。通过仔细调节基板温度，液滴间距，液滴速度和其他印刷参数，在两个导电层之间印刷具有良好表面形态的聚酰亚胺膜以制造电容器。在这项工作中，使用厚度小于1 m的聚酰亚胺绝缘层的电容器（10 mm x 10 mm）可获得最高的电容值2.82 +/- 0.64 nF，这表明聚酰亚胺喷墨印刷方法是生产电介质的有效方法微电子设备的组件。 （c）2016年由Wiley Periodicals，Inc.出版的《应用聚合物科学的作者》杂志。 Polym。科学2016，133，43361。

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