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Wide bandgap p-type window layer prepared by trimethylboron doping at high temperature for a-Si:H superstrate solar cell

机译:三甲基硼高温掺杂制备的a-Si:H表面超薄太阳能电池宽带隙p型窗口层

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摘要

Wide bandgap p-type window layer is necessary for silicon thin film solar cell to obtain excellent performance, such as high open-circuit voltage (V _(OC)), and large short-circuit current density (J _(SC)). Instead of the usually used material, SiC _x:H or SiO x:H fabricated by incorporating C or O into the Si matrix, and nc-Si:H deposited at a very low temperature, wide bandgap p-type window layer was realized here by doping with trimethylboron (TMB) at a relatively high temperature via plasma enhanced chemical vapor deposition (PECVD). Excellent performance with V _(OC) larger than 900 mV was achieved for p-i-n superstrate solar cell on SnO _2:F coated glass while the p-type window layer was deposited at 200 °C to 250 °C. By investigating the influence of the deposition temperature on the p-layer bandgap and microstructure further, it was found that the compromise between wide bandgap and good quality of the p-layer determined the solar cell performance.
机译:宽带隙p型窗口层是硅薄膜太阳能电池获得高开路电压(V _(OC))和大短路电流密度(J _(SC))等优异性能所必需的。代替通常使用的材料,这里实现了通过将C或O掺入Si基体中而制成的SiC _x:H或SiO x:H,并在非常低的温度下沉积了宽带隙p型窗口层的nc-Si:H通过在较高温度下通过等离子体增强化学气相沉积(PECVD)掺杂三甲基硼(TMB)来实现。当在200°C至250°C沉积p型窗口层时,在SnO _2:F涂层玻璃上的p-i-n上层太阳能电池的V _(OC)大于900 mV,可获得出色的性能。通过进一步研究沉积温度对p层带隙和微结构的影响,发现宽带隙与p层的良好质量之间的折衷决定了太阳能电池的性能。

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