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首页> 外文期刊>Nanotechnology >Fluorinated low-viscosity copolymer with enhanced release property for roll-to-plate UV nanoimprint lithography
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Fluorinated low-viscosity copolymer with enhanced release property for roll-to-plate UV nanoimprint lithography

机译：氟化低粘度共聚物，具有增强的粘结性UV纳米压印光刻的脱模性

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摘要

A new fluorinated low-viscosity copolymer resin with enhanced release properties has been developed to provide higher fidelity for roll-based ultraviolet (UV) nanoimprint lithography (NIL) and simplify the process. The properties are optimized by blending (2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,9-heptadecafluorononyl) oxirane (EP-F8) and 1,4-butanediol divinyl ether (BDDVE) with 3,4-epoxycyclohexylmethyl-3,4-epoxy cyclohexane carboxylate. The cured resin renders the hydrophobicity and allows demolding from the stamp mold without an anti-stick layer (ASL), as further verified by the contact angle and the work of adhesion measurements. Due to the addition of BDDVE, our resin also has much lower viscosity compared to commercially available low-viscosity resins. These properties enable the transfer of high-density dot patterns by roll-to-plate (R2P) UV NIL in the newly developed resin without adding solvent or coating it with an ASL. These results demonstrate that our resin is a good option for high-quality, low-cost R2P UV NIL, as its use eliminates several steps in the imprinting process, making it applicable to the scalable fabrication of flexible devices.
机译：已经开发出一种具有增强释放性能的新型氟化低粘度共聚物树脂，以提供更高的轧辊紫外线（UV）纳米压印光刻（NIL）并简化该方法的保真度。通过混合（2,2,3,3,4,4,5,5,6,6,7,7,7,8,8,9,9,9,9-庚二氟壬基）氧化乙烷（EP-F8）优化该性能1,4-丁二醇二乙醚（BDDVE），具有3,4-环氧环己基甲基-3,4-环氧环己烷羧酸盐。固化树脂使疏水性呈现疏水性，并且允许从印模模具中脱模而没有防粘层（ASL），如接触角和粘合测量的工作进一步验证。由于BDDVE的添加，与市售的低粘度树脂相比，我们的树脂也具有远低得多的粘度。这些性质使得通过在新开发的树脂中通过卷到板（R2P）UV Nil传递高密度点图案，而不加入溶剂或用ASL涂覆。这些结果表明，我们的树脂是高质量的低成本R2P UV NIL的良好选择，因为它的使用消除了压印过程中的几个步骤，使其适用于可伸缩装置的可伸缩制造。

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