Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

Nematollahi Mohammadreza; Lucke Philip; Bayraktar Muharrem; Yakshin Andrey; Rijnders Guus; Bijkerk Fred

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Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

机译：纳米级压电表面调制，适用于自适应极紫外线和软X射线光学

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Extreme ultraviolet and soft x-ray wavelengths have ever-increasing applications in photolithography, imaging, and spectroscopy. Adaptive schemes for wavefront correction at such a short wavelength range have recently gained much attention. In this Letter we report, to the best of our knowledge, the first demonstration of a functional actuator based on piezoelectric thin films. We introduce a new approach that allows producing a gradually varying surface deformation. White light interferometery is used to show the level of control in generating arbitrary surface profiles at the nanoscale. (C) 2019 Optical Society of America

机译：极端紫外线和软X射线波长在光刻，成像和光谱中具有不断增加的应用。在这种短波长范围内的波前校正的自适应方案最近获得了很多关注。在这封信中，我们报告了我们的知识，首先是基于压电薄膜的功能执行器的第一次演示。我们介绍一种新的方法，允许产生逐渐变化的表面变形。白光干涉测量用于显示在纳米级上产生任意表面轮廓的控制水平。（c）2019年光学学会

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《Optics Letters》 |2019年第20期|共4页
作者
Nematollahi Mohammadreza; Lucke Philip; Bayraktar Muharrem; Yakshin Andrey; Rijnders Guus; Bijkerk Fred;
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Univ Twente MESA Inst Nanotechnol Ind Focus Grp XUV Opt POB 217 NL-7500 AE Enschede Netherlands;

Univ Twente MESA Inst Nanotechnol Ind Focus Grp XUV Opt POB 217 NL-7500 AE Enschede Netherlands;

Univ Twente MESA Inst Nanotechnol Ind Focus Grp XUV Opt POB 217 NL-7500 AE Enschede Netherlands;

Univ Twente MESA Inst Nanotechnol Ind Focus Grp XUV Opt POB 217 NL-7500 AE Enschede Netherlands;

Univ Twente MESA Inst Nanotechnol Inorgan Mat Sci Grp POB 217 NL-7500 AE Enschede Netherlands;

Univ Twente MESA Inst Nanotechnol Ind Focus Grp XUV Opt POB 217 NL-7500 AE Enschede Netherlands;

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正文语种 eng
中图分类计量学;光学;
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1. Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics [J] . Nematollahi Mohammadreza, Lucke Philip, Bayraktar Muharrem, Optics Letters . 2019,第20期

机译：纳米级压电表面调制，适用于自适应极紫外线和软X射线光学
2. Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands [J] . Barysheva M.M., Pestov A.E., Salashchenko N.N., Physics - Uspekhi . 2012,第7期

机译：精密成像多层光学器件，用于软X射线和极紫外波段
3. Diffractive optical elements based on Fourier optical techniques: a new class of optics for extreme ultraviolet and soft x-ray wavelengths [J] . Chang C., Naulleau P., Anderson E., Applied optics . 2002,第35期

机译：基于傅立叶光学技术的衍射光学元件：用于极端紫外和软X射线波长的新型光学器件
4. Advances in microscopic imaging at the nanoscale using soft X-rays and extreme ultraviolet (EUV) from a compact laser plasma source [C] . Przemyslaw Wachulak, Andrzej Bartnik, Henryk Fiedorowicz Conference on Advances in Microscopic Imaging . 2019

机译：使用来自紧凑型激光等离子体源的软X射线和极端紫外线（EUV）在纳米级微观成像的研究进展
5. Development of extreme ultraviolet and soft x-ray multilayer optics for scientific studies with femtosecond/attosecond sources. [D] . Aquila, Andrew Lee. 2009

机译：开发用于飞秒/阿秒光源的科学研究用的极紫外和软X射线多层光学器件。
6. Dynamic adaptive X-ray optics. Part II. High-speed piezoelectric bimorph deformable Kirkpatrick–Baez mirrors for rapid variation of the 2D size and shape of X-ray beams [O] . Simon G. Alcock, Ioana-Theodora Nistea, Riccardo Signorato, -1

机译：动态自适应X射线光学器件。第二部分高速压电双压电晶片可变形Kirkpatrick-Baez反射镜可快速改变X射线束的二维尺寸和形状
7. Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics [O] . Mohammadreza Nematollahi, Philip Lucke, Muharrem Bayraktar, 2019

机译：纳米级压电表面调制，适用于自适应极紫外线和软X射线光学

Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

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