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Fast and large-area fabrication of plasmonic reflection color filters by achromatic Talbot lithography

机译：通过消极的Talbot光刻进行快速和大面积的等离子体反射滤色器制造

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摘要

To overcome the limits of traditional technologies, which cannot achieve high resolution and high throughput simultaneously, here we propose, to the best of our knowledge, a novel method, i.e., achromatic Talbot lithography, to fabricate large-area nanopatterns fast and precisely. We successfully demonstrate reflection color filters with a maximum size of about 0.72 x 0.72 mm(2) with a time of only 20 s that have colors similar to simulations and small-area devices fabricated by electron beam lithography. These results indicate the possibility of large-scale fabrication of plasmonic color filters with high resolution efficiently by the achromatic Talbot lithography method. (C) 2019 Optical Society of America
机译：为了克服传统技术的极限，在这里，我们提出了一项知识，这是一种新的方法，即塔罗巴托光刻，以便快速，精确地制造大面积纳米透视图来达到高分辨率和高吞吐量。 我们成功展示了最大尺寸的反射滤色器，其最大约为0.72×0.72mm（2），其时间仅具有与电子束光刻制造的模拟和小区域设备类似的颜色。 这些结果表明，通过消色差滑石光刻方法有效地具有高分辨率大规模制造等压滤色器的可能性。 （c）2019年光学学会

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  • 来源
    《Optics Letters》 |2019年第4期|共4页
  • 作者

    Wu Qingjun; Xia Huijuan; Jia Hao; Wang Hao; Jiang Cheng; Wang Liansheng; Zhao Jun; Tai Renzhong; Xiao Sanshui; Zhang Dongxian; Yang Shumin; Jiang Jianzhong;

  • 作者单位

    Zhejiang Univ State Key Lab Modem Opt Instrumentat Hangzhou 310027 Zhejiang Peoples R China;

    Chinese Acad Sci Shanghai Inst Appl Phys Shanghai 201204 Peoples R China;

    Zhejiang Univ State Key Lab Modem Opt Instrumentat Hangzhou 310027 Zhejiang Peoples R China;

    Zhejiang Univ State Key Lab Modem Opt Instrumentat Hangzhou 310027 Zhejiang Peoples R China;

    Zhejiang Univ State Key Lab Modem Opt Instrumentat Hangzhou 310027 Zhejiang Peoples R China;

    Chinese Acad Sci Shanghai Inst Appl Phys Shanghai 201204 Peoples R China;

    Chinese Acad Sci Shanghai Inst Appl Phys Shanghai 201204 Peoples R China;

    Chinese Acad Sci Shanghai Inst Appl Phys Shanghai 201204 Peoples R China;

    Tech Univ Denmark Dept Photon Engn DK-2800 Lyngby Denmark;

    Zhejiang Univ State Key Lab Modem Opt Instrumentat Hangzhou 310027 Zhejiang Peoples R China;

    Chinese Acad Sci Shanghai Inst Appl Phys Shanghai 201204 Peoples R China;

    Zhejiang Univ Int Ctr New Struct Mat State Key Lab Silicon Mat Hangzhou 310027 Zhejiang Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 计量学;光学;
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